JPH0274365U - - Google Patents
Info
- Publication number
- JPH0274365U JPH0274365U JP15060488U JP15060488U JPH0274365U JP H0274365 U JPH0274365 U JP H0274365U JP 15060488 U JP15060488 U JP 15060488U JP 15060488 U JP15060488 U JP 15060488U JP H0274365 U JPH0274365 U JP H0274365U
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- plasma processing
- exhaust hole
- exhaust
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
Description
第１図は、本考案の一実施例を示すプラズマ処
理室底面の平面図、第２図は、その断面図、第３
図は、従来のものを示す構成図である。
尚、図中１はプラズマ処理室、２は排気孔、８
は排気カバー、９は小孔である。
FIG. 1 is a plan view of the bottom of a plasma processing chamber showing an embodiment of the present invention, FIG. 2 is a sectional view thereof, and FIG.
The figure is a configuration diagram showing a conventional one. In the figure, 1 is the plasma processing chamber, 2 is the exhaust hole, and 8 is the plasma processing chamber.
is an exhaust cover, and 9 is a small hole.
Claims (1)
排気孔を設け、同排気孔に異なる径及び／又は異
なる数の小孔を有するカバーを取替え可能に装着
したことを特徴とするプラズマ処理室の排気孔構
造。 An exhaust hole for a plasma processing chamber, characterized in that at least two or more exhaust holes are provided on the bottom of the plasma processing chamber, and a cover having a different diameter and/or a different number of small holes is replaceably attached to the exhaust hole. structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15060488U JPH0274365U (en) | 1988-11-18 | 1988-11-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15060488U JPH0274365U (en) | 1988-11-18 | 1988-11-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0274365U true JPH0274365U (en) | 1990-06-06 |
Family
ID=31423899
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15060488U Pending JPH0274365U (en) | 1988-11-18 | 1988-11-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0274365U (en) |
-
1988
- 1988-11-18 JP JP15060488U patent/JPH0274365U/ja active Pending