JPH0274363U - - Google Patents
Info
- Publication number
- JPH0274363U JPH0274363U JP15060288U JP15060288U JPH0274363U JP H0274363 U JPH0274363 U JP H0274363U JP 15060288 U JP15060288 U JP 15060288U JP 15060288 U JP15060288 U JP 15060288U JP H0274363 U JPH0274363 U JP H0274363U
- Authority
- JP
- Japan
- Prior art keywords
- substrate holder
- rotating substrate
- sputtering apparatus
- vacuum chamber
- processing container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15060288U JPH0274363U (cs) | 1988-11-18 | 1988-11-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15060288U JPH0274363U (cs) | 1988-11-18 | 1988-11-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0274363U true JPH0274363U (cs) | 1990-06-06 |
Family
ID=31423895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15060288U Pending JPH0274363U (cs) | 1988-11-18 | 1988-11-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0274363U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022166690A (ja) * | 2021-04-21 | 2022-11-02 | 東京エレクトロン株式会社 | 真空処理装置 |
-
1988
- 1988-11-18 JP JP15060288U patent/JPH0274363U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022166690A (ja) * | 2021-04-21 | 2022-11-02 | 東京エレクトロン株式会社 | 真空処理装置 |
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