JPH0272546U - - Google Patents
Info
- Publication number
- JPH0272546U JPH0272546U JP15275388U JP15275388U JPH0272546U JP H0272546 U JPH0272546 U JP H0272546U JP 15275388 U JP15275388 U JP 15275388U JP 15275388 U JP15275388 U JP 15275388U JP H0272546 U JPH0272546 U JP H0272546U
- Authority
- JP
- Japan
- Prior art keywords
- case
- lid
- container
- utility
- wafer carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15275388U JPH0272546U (en:Method) | 1988-11-22 | 1988-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15275388U JPH0272546U (en:Method) | 1988-11-22 | 1988-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0272546U true JPH0272546U (en:Method) | 1990-06-01 |
Family
ID=31427963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15275388U Pending JPH0272546U (en:Method) | 1988-11-22 | 1988-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0272546U (en:Method) |
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1988
- 1988-11-22 JP JP15275388U patent/JPH0272546U/ja active Pending