JPH02721U - - Google Patents

Info

Publication number
JPH02721U
JPH02721U JP7779788U JP7779788U JPH02721U JP H02721 U JPH02721 U JP H02721U JP 7779788 U JP7779788 U JP 7779788U JP 7779788 U JP7779788 U JP 7779788U JP H02721 U JPH02721 U JP H02721U
Authority
JP
Japan
Prior art keywords
wafer
locking shoulder
support
support device
guide surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7779788U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7779788U priority Critical patent/JPH02721U/ja
Publication of JPH02721U publication Critical patent/JPH02721U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Separation Of Particles Using Liquids (AREA)
JP7779788U 1988-06-14 1988-06-14 Pending JPH02721U (US07860544-20101228-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7779788U JPH02721U (US07860544-20101228-C00003.png) 1988-06-14 1988-06-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7779788U JPH02721U (US07860544-20101228-C00003.png) 1988-06-14 1988-06-14

Publications (1)

Publication Number Publication Date
JPH02721U true JPH02721U (US07860544-20101228-C00003.png) 1990-01-05

Family

ID=31302759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7779788U Pending JPH02721U (US07860544-20101228-C00003.png) 1988-06-14 1988-06-14

Country Status (1)

Country Link
JP (1) JPH02721U (US07860544-20101228-C00003.png)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5737837A (en) * 1980-08-20 1982-03-02 Toshiba Corp Drying device for semiconductor wafer
JPS58217184A (ja) * 1982-06-09 1983-12-17 三菱電機株式会社 ウエハ乾燥装置
JPS63178531A (ja) * 1987-01-20 1988-07-22 Fujitsu Ltd 水洗式中間ステ−ジ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5737837A (en) * 1980-08-20 1982-03-02 Toshiba Corp Drying device for semiconductor wafer
JPS58217184A (ja) * 1982-06-09 1983-12-17 三菱電機株式会社 ウエハ乾燥装置
JPS63178531A (ja) * 1987-01-20 1988-07-22 Fujitsu Ltd 水洗式中間ステ−ジ

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