JPH0270460U - - Google Patents

Info

Publication number

JPH0270460U

JPH0270460U JP1988149464U JP14946488U JPH0270460U JP H0270460 U JPH0270460 U JP H0270460U JP 1988149464 U JP1988149464 U JP 1988149464U JP 14946488 U JP14946488 U JP 14946488U JP H0270460 U JPH0270460 U JP H0270460U

Authority

JP

Japan

Prior art keywords

layer

diffusion layer

metal

cell type

type mask

Prior art date

1988-11-16

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000009792 diffusion process Methods 0.000 claims description 4
• 239000002184 metal Substances 0.000 claims 2
• 229910021332 silicide Inorganic materials 0.000 claims 1
• FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims 1
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 229910021344 molybdenum silicide Inorganic materials 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1