JPH0270429U - - Google Patents
Info
- Publication number
- JPH0270429U JPH0270429U JP15023888U JP15023888U JPH0270429U JP H0270429 U JPH0270429 U JP H0270429U JP 15023888 U JP15023888 U JP 15023888U JP 15023888 U JP15023888 U JP 15023888U JP H0270429 U JPH0270429 U JP H0270429U
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- mounting table
- wheels
- sled
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15023888U JPH0270429U (me) | 1988-11-17 | 1988-11-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15023888U JPH0270429U (me) | 1988-11-17 | 1988-11-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0270429U true JPH0270429U (me) | 1990-05-29 |
Family
ID=31423201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15023888U Pending JPH0270429U (me) | 1988-11-17 | 1988-11-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0270429U (me) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017115573A1 (ja) * | 2015-12-28 | 2017-07-06 | 三菱電機株式会社 | 横型拡散炉および太陽電池セルの製造方法 |
-
1988
- 1988-11-17 JP JP15023888U patent/JPH0270429U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017115573A1 (ja) * | 2015-12-28 | 2017-07-06 | 三菱電機株式会社 | 横型拡散炉および太陽電池セルの製造方法 |