JPH0270426U - - Google Patents
Info
- Publication number
- JPH0270426U JPH0270426U JP15020588U JP15020588U JPH0270426U JP H0270426 U JPH0270426 U JP H0270426U JP 15020588 U JP15020588 U JP 15020588U JP 15020588 U JP15020588 U JP 15020588U JP H0270426 U JPH0270426 U JP H0270426U
- Authority
- JP
- Japan
- Prior art keywords
- hot plate
- wafer
- line
- heats
- coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15020588U JPH0270426U (un) | 1988-11-17 | 1988-11-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15020588U JPH0270426U (un) | 1988-11-17 | 1988-11-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0270426U true JPH0270426U (un) | 1990-05-29 |
Family
ID=31423137
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15020588U Pending JPH0270426U (un) | 1988-11-17 | 1988-11-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0270426U (un) |
-
1988
- 1988-11-17 JP JP15020588U patent/JPH0270426U/ja active Pending