JPH0270426U - - Google Patents
Info
- Publication number
- JPH0270426U JPH0270426U JP15020588U JP15020588U JPH0270426U JP H0270426 U JPH0270426 U JP H0270426U JP 15020588 U JP15020588 U JP 15020588U JP 15020588 U JP15020588 U JP 15020588U JP H0270426 U JPH0270426 U JP H0270426U
- Authority
- JP
- Japan
- Prior art keywords
- hot plate
- wafer
- line
- heats
- coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Description
第１図は本考案の一実施例の概略構造図、第２
図は本考案の他の実施例の概略構造図、第３図は
従来装置の概略構造図である。
１……ヒータ、２……ウエハー、３……スペー
サー、４……断熱材、５……上ぶた。
Fig. 1 is a schematic structural diagram of one embodiment of the present invention;
The figure is a schematic structural diagram of another embodiment of the present invention, and FIG. 3 is a schematic structural diagram of a conventional device. 1...Heater, 2...Wafer, 3...Spacer, 4...Insulating material, 5...Top lid.
Claims (1)
ハーを移動させつつホツトプレートで熱処理を行
うインライン型加熱装置において、ウエハーを上
下から加熱するホツトプレートを有することを特
徴とするインライン型熱処理装置。 An in-line heating apparatus that performs heat treatment on a hot plate while moving a coated or developed wafer from one end of a flat surface to the other end, the in-line heat processing apparatus characterized by having a hot plate that heats the wafer from above and below.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15020588U JPH0270426U (en) | 1988-11-17 | 1988-11-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15020588U JPH0270426U (en) | 1988-11-17 | 1988-11-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0270426U true JPH0270426U (en) | 1990-05-29 |
Family
ID=31423137
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15020588U Pending JPH0270426U (en) | 1988-11-17 | 1988-11-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0270426U (en) |
-
1988
- 1988-11-17 JP JP15020588U patent/JPH0270426U/ja active Pending