JPH0268436U - - Google Patents

Info

Publication number

JPH0268436U

JPH0268436U JP14916888U JP14916888U JPH0268436U JP H0268436 U JPH0268436 U JP H0268436U JP 14916888 U JP14916888 U JP 14916888U JP 14916888 U JP14916888 U JP 14916888U JP H0268436 U JPH0268436 U JP H0268436U

Authority

JP

Japan

Prior art keywords

semiconductor substrate

glass plate

transport mechanism

supplies

supplying

Prior art date

1988-11-15

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000011521 glass Substances 0.000 claims description 11
• 239000004065 semiconductor Substances 0.000 claims description 10
• 239000000758 substrate Substances 0.000 claims description 10
• 230000007246 mechanism Effects 0.000 claims description 6
• 238000010438 heat treatment Methods 0.000 claims description 3
• 238000001816 cooling Methods 0.000 claims description 2
• 230000007723 transport mechanism Effects 0.000 claims 3
• 238000002788 crimping Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1

Cited By (1)