JPH0267646U - - Google Patents
Info
- Publication number
- JPH0267646U JPH0267646U JP14543688U JP14543688U JPH0267646U JP H0267646 U JPH0267646 U JP H0267646U JP 14543688 U JP14543688 U JP 14543688U JP 14543688 U JP14543688 U JP 14543688U JP H0267646 U JPH0267646 U JP H0267646U
- Authority
- JP
- Japan
- Prior art keywords
- holding part
- end holding
- substrate
- clamp
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000001552 radio frequency sputter deposition Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14543688U JPH0267646U (de) | 1988-11-09 | 1988-11-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14543688U JPH0267646U (de) | 1988-11-09 | 1988-11-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0267646U true JPH0267646U (de) | 1990-05-22 |
Family
ID=31414025
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14543688U Pending JPH0267646U (de) | 1988-11-09 | 1988-11-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0267646U (de) |
-
1988
- 1988-11-09 JP JP14543688U patent/JPH0267646U/ja active Pending