JPH0267633U - - Google Patents
Info
- Publication number
- JPH0267633U JPH0267633U JP14663188U JP14663188U JPH0267633U JP H0267633 U JPH0267633 U JP H0267633U JP 14663188 U JP14663188 U JP 14663188U JP 14663188 U JP14663188 U JP 14663188U JP H0267633 U JPH0267633 U JP H0267633U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- sample
- processing
- processing chamber
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005684 electric field Effects 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14663188U JPH0267633U (cs) | 1988-11-11 | 1988-11-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14663188U JPH0267633U (cs) | 1988-11-11 | 1988-11-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0267633U true JPH0267633U (cs) | 1990-05-22 |
Family
ID=31416301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14663188U Pending JPH0267633U (cs) | 1988-11-11 | 1988-11-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0267633U (cs) |
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1988
- 1988-11-11 JP JP14663188U patent/JPH0267633U/ja active Pending