JPH0267219U - - Google Patents
Info
- Publication number
- JPH0267219U JPH0267219U JP14687388U JP14687388U JPH0267219U JP H0267219 U JPH0267219 U JP H0267219U JP 14687388 U JP14687388 U JP 14687388U JP 14687388 U JP14687388 U JP 14687388U JP H0267219 U JPH0267219 U JP H0267219U
- Authority
- JP
- Japan
- Prior art keywords
- grating
- light
- scale
- receiving element
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 8
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 3
- 239000012212 insulator Substances 0.000 claims description 3
- 238000005286 illumination Methods 0.000 claims 3
- 230000000903 blocking effect Effects 0.000 claims 1
- 230000000737 periodic effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Optical Transform (AREA)
Description
第１図は、本考案に係る光学式変位検出器の第
１実施例の要部構成を示す縦断面図、第２図は、
第１図の―線に沿う横断面図、第３図は、第
１実施例の第１格子の形状を示す、第１図の―
線に沿う断面図、第４図は、同じく第２及び第
３格子の配置を示す、第１図の―線に沿う断
面図、第５図及び第６図は、同じく第２及び第３
格子の他の配置を示す、第４図と同様の断面図、
第７図は、第１実施例の信号処理回路の基本的な
構成を示す回路図、第８図は、第１実施例の幾何
光学的システムの概念図、第９図は、第２実施例
の回折効果的システムの概念図、第１０図は、従
来の３格子型光学式変位検出器の構成を示す概念
図、第１１図は、検出信号のＳＮ比の定義を示す
線図である。
１２……第１格子（格子ピツチＰ１）、１４…
…第２格子（格子ピツチＰ２）、１６……第３格
子（格子ピツチＰ３）、１８，４２……光源、２
０，４８……受光素子、４０……メインスケール
（第１スケール）、４４……インデツクススケー
ル（第２スケール）、ａ……検出信号、４８……
光絶縁体。
FIG. 1 is a longitudinal sectional view showing the main part configuration of the first embodiment of the optical displacement detector according to the present invention, and FIG.
FIG. 3 is a cross-sectional view taken along line - of FIG. 1, and FIG. 3 is a cross-sectional view taken along line - of FIG.
FIG. 4 is a cross-sectional view taken along the line, FIG. 4 is a cross-sectional view taken along the line - of FIG.
a cross-sectional view similar to FIG. 4 showing another arrangement of the grid;
FIG. 7 is a circuit diagram showing the basic configuration of the signal processing circuit of the first embodiment, FIG. 8 is a conceptual diagram of the geometrical optical system of the first embodiment, and FIG. 9 is a circuit diagram showing the basic configuration of the signal processing circuit of the first embodiment. FIG. 10 is a conceptual diagram showing the configuration of a conventional three-grating optical displacement detector, and FIG. 11 is a diagram showing the definition of the S/N ratio of the detection signal. 12...first lattice (lattice pitch P1 ), 14...
...Second grating (grid pitch P2 ), 16...Third grating (grid pitch P3 ), 18,42...Light source, 2
0, 48... Light receiving element, 40... Main scale (first scale), 44... Index scale (second scale), a... Detection signal, 48...
Optical insulator.
Claims (1)
格子が形成された反射型の第１スケールと、 相対移動する他方の部材に固定される、平行光
線化されていない照明光を射出する光源、該光源
からの照明光を一部遮蔽して、前記第１格子を照
明するための第２格子、及び、該第２及び第１格
子によつて制限された照明光を更に制限するため
の第３格子が形成された第２スケール、及び、前
記第１乃至第３格子によつて制限された照明光を
検出する受光素子とを含み、 該受光素子出力の検出信号の周期的な変動から
前記両部材間の相対変位を検出するようにした反
射式の光学式変位検出器において、 前記光源と受光素子の間に光絶縁体を設け、 該光絶縁体と前記第２スケールの間の隙間を実
質的に無くしたことを特徴とする光学式変位検出
器。[Claims for Utility Model Registration] A reflective first scale on which a first grating is formed, which is fixed to one member that moves relatively, and a parallel light scale that is fixed to the other member that moves relatively. a second grating for partially blocking the illumination light from the light source and illuminating the first grating; a second scale on which a third grating is formed for further restricting the illumination light, and a light receiving element that detects the illumination light restricted by the first to third gratings, and the output of the light receiving element is In a reflective optical displacement detector configured to detect relative displacement between the two members from periodic fluctuations in a detection signal, an optical insulator is provided between the light source and the light receiving element, and the optical insulator and An optical displacement detector characterized in that a gap between the second scales is substantially eliminated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988146873U JPH0617045Y2 (en) | 1988-11-10 | 1988-11-10 | Optical displacement detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988146873U JPH0617045Y2 (en) | 1988-11-10 | 1988-11-10 | Optical displacement detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0267219U true JPH0267219U (en) | 1990-05-22 |
| JPH0617045Y2 JPH0617045Y2 (en) | 1994-05-02 |
Family
ID=31416762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988146873U Expired - Lifetime JPH0617045Y2 (en) | 1988-11-10 | 1988-11-10 | Optical displacement detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0617045Y2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006008883A1 (en) * | 2004-07-22 | 2006-01-26 | Kabushiki Kaisha Yaskawa Denki | Reflection optical detector |
| JP2007183251A (en) * | 2005-12-06 | 2007-07-19 | Mitsutoyo Corp | Photoelectric encoder |
| JP2012159518A (en) * | 2012-05-28 | 2012-08-23 | Olympus Corp | Reflection-type optical encoder |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62150118A (en) * | 1985-12-25 | 1987-07-04 | Mitsutoyo Mfg Corp | Optical displacement detector |
-
1988
- 1988-11-10 JP JP1988146873U patent/JPH0617045Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62150118A (en) * | 1985-12-25 | 1987-07-04 | Mitsutoyo Mfg Corp | Optical displacement detector |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006008883A1 (en) * | 2004-07-22 | 2006-01-26 | Kabushiki Kaisha Yaskawa Denki | Reflection optical detector |
| JP2007183251A (en) * | 2005-12-06 | 2007-07-19 | Mitsutoyo Corp | Photoelectric encoder |
| JP2012159518A (en) * | 2012-05-28 | 2012-08-23 | Olympus Corp | Reflection-type optical encoder |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0617045Y2 (en) | 1994-05-02 |
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