JPH0266943U - - Google Patents
Info
- Publication number
- JPH0266943U JPH0266943U JP12675889U JP12675889U JPH0266943U JP H0266943 U JPH0266943 U JP H0266943U JP 12675889 U JP12675889 U JP 12675889U JP 12675889 U JP12675889 U JP 12675889U JP H0266943 U JPH0266943 U JP H0266943U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- grinding
- chamfering
- corner
- moved
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
Landscapes
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12675889U JPH045241Y2 (ro) | 1989-10-30 | 1989-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12675889U JPH045241Y2 (ro) | 1989-10-30 | 1989-10-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0266943U true JPH0266943U (ro) | 1990-05-21 |
| JPH045241Y2 JPH045241Y2 (ro) | 1992-02-14 |
Family
ID=31378564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12675889U Expired JPH045241Y2 (ro) | 1989-10-30 | 1989-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH045241Y2 (ro) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0469150A (ja) * | 1990-07-09 | 1992-03-04 | Bandou Kiko Kk | ガラス板の数値制御研削機械 |
| JP2009142913A (ja) * | 2007-12-12 | 2009-07-02 | Sumitomo Metal Mining Co Ltd | ウェハーのベベル加工法とホイール型回転砥石 |
-
1989
- 1989-10-30 JP JP12675889U patent/JPH045241Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0469150A (ja) * | 1990-07-09 | 1992-03-04 | Bandou Kiko Kk | ガラス板の数値制御研削機械 |
| JP2009142913A (ja) * | 2007-12-12 | 2009-07-02 | Sumitomo Metal Mining Co Ltd | ウェハーのベベル加工法とホイール型回転砥石 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH045241Y2 (ro) | 1992-02-14 |