JPH0266681U - - Google Patents
Info
- Publication number
- JPH0266681U JPH0266681U JP14677988U JP14677988U JPH0266681U JP H0266681 U JPH0266681 U JP H0266681U JP 14677988 U JP14677988 U JP 14677988U JP 14677988 U JP14677988 U JP 14677988U JP H0266681 U JPH0266681 U JP H0266681U
- Authority
- JP
- Japan
- Prior art keywords
- stock solution
- source gas
- epitaxial growth
- remaining amount
- gas supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011550 stock solution Substances 0.000 claims description 7
- 239000000498 cooling water Substances 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 2
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14677988U JPH0266681U (enExample) | 1988-11-09 | 1988-11-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14677988U JPH0266681U (enExample) | 1988-11-09 | 1988-11-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0266681U true JPH0266681U (enExample) | 1990-05-21 |
Family
ID=31416585
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14677988U Pending JPH0266681U (enExample) | 1988-11-09 | 1988-11-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0266681U (enExample) |
-
1988
- 1988-11-09 JP JP14677988U patent/JPH0266681U/ja active Pending