JPH0265939A - Driving device for sliding body of static pressure fluid bearing - Google Patents

Abstract

PURPOSE:To transfer intermittently the sliding body floated on a guide shaft ultrafinely by transferring the sliding body by the operation of an actuator for driving to be controlled via a controller and providing an actuator for holding for fixing the sliding body at the position transferred on each one operation of this actuator. CONSTITUTION:The actuator 18 for driving which transfers a sliding body 2, the actuator 6 for holding which fixes this sliding body 2 at the position transferred on each one operation of the driving actuator 18 and the actuator 7 for drive linking which links the operation of this driving actuator 18 to the sliding body 2 are controlled electrically by a controller C. The sliding body 2 is thus transferred superfinely, intermittently and in a long distance in the state of being floated by a static pressure bearing on the guide shaft.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention is used in precision processing equipment, precision measurement equipment, etc., by floating a sliding body on a guide shaft through a static pressure gap, and The present invention relates to a driving device (a) for a hydrostatic fluid bearing bed moving body that is configured to move a small amount.

[Prior art 1] Conventionally, as shown in FIG. 4, a sliding body 29 that floats by static pressure gas is provided on a guide shaft 28, and the side plate 23 of the base 22 is mounted on the guide shaft 28.
A threaded rod 25 rotatably supported by a shaft 24 is driven by a motor H fixed to the one side plate 23, and a bearing 27 provided on the sliding body 29 and the threaded rod 25 are driven by a ball screw system. In connection, the motor H
A driving device is provided that controls the driving of the slider 29 to adjust the movement of the slider 29 onto the guide shaft 28.

Further, as shown in FIG. 5, a sliding body 39 that floats by static pressure gas is provided on the guide shaft 38, and a wire 35.
35 and pulleys 33 and 33, and a drive device is provided which adjusts the movement of the sliding body 39 onto the guide shaft 38 by controlling the drive of the motor H.

These driving methods can sufficiently perform coarse driving, but in order to achieve fine driving, it is necessary to provide a means to move the sliding body intermittently while detecting the position of the sliding body in a higher resolution manner. Must be. Conventionally, No. 6 was used for minute feeds.
As shown in the figure, a method is adopted in which a piezoelectric element 40 (hereinafter referred to as actuator V) is directly connected to a sliding body 49.

[Problem to be solved by the invention] However, in the method using the actuator,
Since this actuator is directly connected to the sliding body,
The actuator can only feed by the maximum displacement (approximately 10 μm). Furthermore, in order to increase this feed, it is possible to amplify the displacement of the actuator using a lever structure, but this increases the distance between the fulcrum of the lever and the point of action, and there is a space limit.

[Means for Solving the Problems] Accordingly, the present invention provides a driving actuator for transporting a sliding body, a holding actuator for fixing this one and the moving body at the position moved for each movement of the driving actuator. , comprising a drive coupling actuator that connects the operation of the drive actuator to a sliding body, and a controller 1 to a roller that electrically controls each of the actuators, and operates the drive actuator under control of the controller roller. The above problem was solved by moving the sliding body.

The present invention provides a hydrostatic fluid bearing bed moving body drive device suitable for ultra-fine transfer of a sliding body floating on a guide shaft by static pressure gas.

[Example] Hereinafter, an example of the present invention will be explained with reference to the drawings. As shown in FIGS. 1, 2, and 3, the driving device for a static pressure gas bearing bed moving body according to the present invention has a guide shaft 1 which is connected to a guide shaft 1 made of an alumina sintered body through a static pressure gap S. A sliding body 2 that moves with the guide shaft 1 is provided on the guide shaft. A holding member 5 consisting of a central column 3 fixed to the sliding body 2 and retaining walls 4.4 provided on both sides thereof is provided at the lower part of the sliding body 2. In between, a holding actuator 6 fixes the sliding body 2 at the transferred position, and a driving actuator (to be described later) performs one operation of the moving body 2.
A drive connection actuator 1 for connection to the central column 3 is fixed to the central column 3, and a belt 13.14 (described later) is placed between the outer working end of each actuator 6.7 and the inner surface of the retaining wall 4.4. Two holding parts 8.9 are formed through which the belt 13.14 can be held or released by actuation of the actuator 6.7. Further, a fixing belt 13 is provided that is inserted into the one holding part 8 and fixed to the side plate 11.12 of the base 10, and the other holding part 9
A drive belt 14 is provided which is inserted through the drive belt 14. The drive belt 14 has one end attached to the support metal 1 on the side plate 11.
5 via a spring 16 which is an elastic member, and the square end is attached to a support fitting 17 attached to the side plate 12.

Further, a drive actuator 18 is contained in the inner surface of the metal fitting 17 and the outer surface of the side plate 12, and a notch 19 is formed in a part of the metal fitting 17 to give flexibility to the metal fitting 17. By operating the actuator 18, the drive belt 14 is moved left and right against the spring 16.

In this way, by controlling and sending pulse signals to each of the actuators 6, 7, and 18 using the controller C shown in FIG. 2, each actuator is operated as follows, and the sliding body 2 is intermittently Let it be transferred.

That is, in a steady state, voltage is applied to one holding actuator 6 to hold the fixed belt 13 in the holding part 8, while the other drive coupling actuator 7 is in a de-energized state and the other holding part 9 is in a released state. Yes, the sliding body 2 remains stationary.

In this state, a voltage is applied to the drive coupling actuator 1 to hold the drive belt 14 in the holding section 9, and at the same time, the voltage to the one holding actuator 6 is turned off to release the holding state of the fixed belt 13.

Next, a voltage is applied to the drive actuator 18 to displace the drive belt 14 to the right against the spring 16. At this time, since the fixing belt 13 is released from the holding state in the holding part 8, the sliding body 2 moves to the right together with the holding member 5. In this moved state, a voltage is applied to the holding actuator 6 to hold the fixed belt 13 in the holding section 8 . Next, when the drive coupling actuator 70 is de-energized and this holding portion 9 is released, and the drive actuator 18 is de-energized, the sliding body 2 remains stationary and only the drive belt 14 is restored by the reaction of the spring 16. and returns to the steady state described above. In this way, the sliding body 2 moves to the right by the amount of displacement of the drive actuator 18 and the drive belt 14. Then, by repeating the above series of operations, the sliding body 2 moves to the right.

Conversely, in order to move leftward, when a voltage is applied to the drive actuator 18 from the above-mentioned steady state, since the holding part 9 is released, the drive belt 14 is moved by the spring 1.
Move to the right against the 6 forces.

Next, a voltage is applied to the drive connection actuator 7 to hold the drive belt 14 in the holding section 9 . Next, when the holding actuator 6 is de-energized, the holding part 8 is released, and the driving actuator 18 is de-energized at the same time, the driving belt 14 returns to its original position due to the reaction of the spring 16. At this time, the sliding body 2 moves in the direction corresponding to the displacement m of the drive belt 14 and the drive actuator 18.Next, a voltage is applied to the holding actuator 6, and one of the holding parts 8
While holding the fixing belt 13, the drive connection actuator 7 is de-energized and the holding part 9 is released to return to the original steady state. By repeating the above series of operations, the sliding body 2 is moved to the left.

In this way, the driving actuator 18 that moves the sliding body 2 for each movement, the holding actuator 6 that fixes the sliding body 2 at the transferred position, and the driving actuator 18 that moves the sliding body 2 for each movement, 2, and each of the actuators 6.1.1.
8 and a controller C that electrically controls the controller C.
By controlling the controllers 1 to C, the sliding body 2 is intermittently transferred onto the guide shaft 1 for each movement of the drive actuator 18.

[Effects of the Invention] As described above, according to the present invention, there is provided a driving actuator for transporting a sliding body, a holding actuator for fixing this sliding body at a position transferred for each movement of the driving actuator, and a The drive connection actuator, which connects the operation of the drive actuator to the sliding body, is controlled via the controller, so that the sliding body is transferred by the operation of the drive actuator, so that the sliding body is moved onto the guide shaft by static pressure fluid. It is possible to provide a driving device for a static pressure gas bearing layer moving body that can move a floating sliding body intermittently and over a long distance in an ultra-fine manner.

[Brief explanation of the drawing]

Fig. 1 is a side view of a drive device for a static pressure gas bearing (8 moving bodies) according to an embodiment of the present invention, and Fig. 2 is a drawing of the ■-■ line in Fig. 1.
The figure is a cross-sectional view taken along the line ■-■ in Figure 1, Figure 4 is a side view of the same drive device employing the conventional ball screw method, and Figure 5 is the same example of the conventional drive transmission system using wires and pulleys. A side view of the drive device, FIG. 6 is a side view showing a conventional example using an actuator. 1. Guide shaft 2. I Actuator for driving and connecting the actuator for holding the holding member of the learning body Actuator for driving the belt elastic member for driving the fixed belt holding part

Claims (1)

[Claims] A driving device for a sliding body that is movable by floating the sliding body on a guide shaft using static pressure fluid includes a driving actuator that moves the sliding body, and a driving actuator that moves the sliding body every time the driving actuator moves. a holding actuator that fixes the drive actuator in a fixed position; a drive connection actuator that connects the operation of the drive actuator to the sliding body; and a controller that electrically controls each of the actuators; A driving device for a hydrostatic fluid bearing layer moving body, characterized in that the sliding body is moved by the operation of an actuator.