JPH0262936A - Hygrometer - Google Patents

Hygrometer

Info

Publication number
JPH0262936A
JPH0262936A JP63215758A JP21575888A JPH0262936A JP H0262936 A JPH0262936 A JP H0262936A JP 63215758 A JP63215758 A JP 63215758A JP 21575888 A JP21575888 A JP 21575888A JP H0262936 A JPH0262936 A JP H0262936A
Authority
JP
Japan
Prior art keywords
water
optical fiber
light
humidity
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63215758A
Other languages
Japanese (ja)
Inventor
Hideo Kobayashi
英夫 小林
Morio Shigeno
重野 守男
Kenji Motosugi
本杉 賢司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chino Corp
Original Assignee
Chino Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chino Corp filed Critical Chino Corp
Priority to JP63215758A priority Critical patent/JPH0262936A/en
Publication of JPH0262936A publication Critical patent/JPH0262936A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3554Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for determining moisture content

Abstract

PURPOSE:To improve follow-up performed and responsiveness to temperature variation and humidity variation by using an optical fiber for signal transmission from a sensor and then providing the hygrometer which is a sensor part and a part of the optical fiber although it is installed in humid environment. CONSTITUTION:Sensors 8 are formed of porous glass as water adsorbing carriers atop of optical fibers 7, 10, and 70, and specular surface parts 9 are formed on their end surfaces by metal coating. Light emitted by a light emission part 6 passes through an optical system and the optical fibers 7 and 70 and is project ed in the sensors 8 and reflected by the specular surfaces 9 to return a hygrome ter main body 5 through the optical fiber 10; and the quantities of attenuation of the reflected light beams are measured to measure humidity by a part 14. Then two wavelengths in the infrared-ray range are selected for light for measur ing the amount of adsorbed water and the absorption zone and nonabsorption zone of water are set to increase detection sensitivity, thereby removing the influence of a disturbing element. Further, the optical fibers are coated with 'Teflon(R)' which adsorbs no water to remove an error due to the adsorption and desorption of water.

Description

【発明の詳細な説明】 [産業上の利用分野] 本光明は、環境測定及び制御等に使用される光ファイバ
ーを利用した湿度計に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a hygrometer using optical fibers used for environmental measurement and control.

[従来の技術1 湿度の測定制御に使用出来るよう電気1言号出力を有す
る従来からの湿度計は、物体の水分吸着現象を利用する
湿度計ど、物体の水分吸着現象を利用しない湿度計の2
?l類に大別される。
[Prior art 1] Conventional hygrometers that have a one-word electrical output that can be used to measure and control humidity include hygrometers that utilize the moisture absorption phenomenon of objects, and hygrometers that do not utilize the moisture absorption phenomenon of objects. 2
? It is broadly classified into type l.

物体の水分吸着現象を利用する湿度計としては、カーボ
ン粉末、金i粉末などの導電性徴t5)末を混入した高
分子樹脂の、膨潤による抵抗変化を利用した物、高分子
樹脂の水分吸nによる静電、容量変化を利用した物、セ
ラミックの水分吸着による抵抗変化を利用した物などが
ある。
Hygrometers that utilize the moisture absorption phenomenon of objects include those that utilize the resistance change due to swelling of polymer resins mixed with conductive powders such as carbon powder and gold i powder, and moisture meters that utilize moisture absorption of polymer resins. There are some that utilize static electricity and capacitance changes, and others that utilize resistance changes due to moisture adsorption in ceramics.

これらの湿度計は、センサ材料に水分吸着能力の高い素
材を1史用することで、小体積の水分吸着現象で多量の
水分を捕捉し、吸着水分量の変1ヒによる物理的・化学
的変化を容易に電気信号に変換できる点が特徴である。
These hygrometers use materials with high moisture adsorption capacity as sensor materials, which allows them to capture a large amount of moisture through the phenomenon of moisture adsorption in a small volume. It is characterized by the ability to easily convert changes into electrical signals.

このため、湿度検出機構や回路構成がlIi純になり、
その結果、機器全体も小形、軽量で、可搬性が良い。ま
た、これらの湿度計は、湿度検出部が分離しいるため設
置し易く、比較的安価で、多数使用されている。
For this reason, the humidity detection mechanism and circuit configuration are pure,
As a result, the entire device is small, lightweight, and highly portable. Furthermore, these hygrometers have a separate humidity detection section, so they are easy to install, relatively inexpensive, and are used in large numbers.

しかし、これらの湿度h1は、物体の水分吸着現象を利
用してセンサそのものを小さくしているのにかかわらず
、抵抗変化あるいは静電容量変化を電気信号に変換する
ための回路を湿度検出部内に有するため、結果として、
湿度検出部がセンサそのものに対して大きくなり、温度
変化、湿度変化に対する追従性が悪くなり、測定i、P
l差を生ずる結果となっている。また、電気回路を湿度
検出部内にイ1するため、高温高湿測定環境下では、経
時的にリークを生じ、故障、破損に至る。
However, despite the fact that the sensor itself is made smaller by utilizing the moisture adsorption phenomenon of objects, these humidity h1s require a circuit inside the humidity detection unit to convert resistance changes or capacitance changes into electrical signals. As a result,
The humidity detection part becomes larger than the sensor itself, and the ability to follow temperature and humidity changes deteriorates, making measurement i, P
This results in a difference of 1. Further, since the electric circuit is installed inside the humidity detecting section, leakage occurs over time under high temperature and high humidity measurement environments, leading to failure and damage.

これに対し、物体の水分吸着現象を利用しない湿度計と
しては、冷却した鏡面の結露現象を光の反射率の変化で
捉える光学式露点計、冷却式電離箱内の結露をα線の吸
収率で捉える露点計、気体中の水分子吊をマイクロ波の
吸収率で捉えるマイクロ波個度計、気体中の木分子伝を
赤外線の吸収で12える赤外線i!ii1度計などがあ
る。
On the other hand, hygrometers that do not utilize the moisture adsorption phenomenon of objects include optical dew point meters that detect dew condensation on a cooled mirror surface by changes in light reflectance, and alpha-ray absorption meters that detect dew condensation in a cooled ionization chamber. A dew point meter that captures water molecules in gases, a microwave individual meter that captures water molecules in gas using microwave absorption, and an infrared i! that measures wood molecules in gases by absorbing infrared rays. There are ii1 degree meters, etc.

これらの湿度計は、一般iこ高精度ではあるが、物体の
水分吸着現象を利用しないため、鏡面や電1lI1箱を
冷却したり、マイクロ波の共振系を大きくしたり、赤外
線の光路長を長くするなどの方法で、湿度に対する検出
力を得ている。このため、湿度検出部を分離することが
出来ず、回路も複雑になり、機器全体も大型になり、か
つ高価である。
Although these hygrometers are generally highly accurate, they do not utilize the moisture adsorption phenomenon of objects, so they do not require cooling the mirror surface or electric box, enlarging the microwave resonance system, or increasing the infrared optical path length. The ability to detect humidity is obtained by increasing the length of the sensor. Therefore, the humidity detection section cannot be separated, the circuit becomes complicated, and the entire device becomes large and expensive.

[この発明が解決しようとする課題] 従来、例えば、第4図の湿度計は、湿度検出部がセンサ
1と初段変換部2で構成され、これが測定環境下にFJ
 Hされるようになっている。ここで、3は四埃フィル
タ、4は信号伝送用のコー、ド、5は湿度計本体である
[Problems to be Solved by the Invention] Conventionally, for example, in the hygrometer shown in FIG.
It is supposed to be fucked. Here, 3 is a four-dust filter, 4 is a signal transmission cord, and 5 is a hygrometer body.

物体の水分吸着現象を利用した水分吸着担体のセンサ1
は小形で、熱容量が小さく、水分の吸脱着による応答性
も速く設計されているのに対し、センサ1の抵抗変化あ
るいは静電容量変化を電気信号に変換するための回路を
有する初段変換部2がかなり大きいため、結果として、
湿度検出部全体はセンサそのものに対して大きくなり、
湿度変化、湿度変化に対する追従性が悪くなり、物体の
吸着現象を利用してセンサを小形化しているという利点
を充分に生かし切れず、測定誤差を生ずる結果となって
いる。
Moisture adsorption carrier sensor 1 that utilizes the moisture adsorption phenomenon of objects
is designed to be small, have a small heat capacity, and have a fast response due to adsorption and desorption of moisture, whereas the first stage converter 2 has a circuit for converting the resistance change or capacitance change of the sensor 1 into an electrical signal. is quite large, so as a result,
The entire humidity detection section is larger than the sensor itself,
The ability to follow changes in humidity and humidity changes is poor, and the advantage of making the sensor smaller by utilizing the attraction phenomenon of objects cannot be fully utilized, resulting in measurement errors.

また、高温高湿度環境下では、センサ1と初段変換部2
のシール部分、初段変換部2とコード4のシール部分に
経時的にリークを生じ、故障、破1(iに至るなど、信
頼性に問題があった。
In addition, in a high temperature and high humidity environment, the sensor 1 and the first stage converter 2
There were problems with reliability, such as leaks occurring over time in the seals of the first stage converter 2 and the cord 4, leading to breakdowns and failures.

本光明は、センサからの信号伝送を光を用いてiテうこ
とにより、初段変換をなくし、センサを小型化したこと
の利点を充分に生かし、温度変化、湿度変化に対する追
従性を良くし、また、電気的なリークを根本的になくす
ことにより、小形、軽澁で応答性が良く、耐熱性が高く
、かつ、1言頼性の高い湿度計を提供することを目的と
するものである。
By using light to transmit signals from the sensor, this Komei eliminates the first-stage conversion, takes full advantage of the miniaturization of the sensor, and improves the ability to follow temperature and humidity changes. Furthermore, by fundamentally eliminating electrical leakage, the aim is to provide a hygrometer that is small, light, responsive, highly heat resistant, and highly reliable. .

[課題を解決するだめの手段1 本発明は、光ファイバー先端に、水分吸着担体としての
多孔質ガラス部分を形成し、この多孔質ガラス部分の表
面に、金属被覆などによる鏡面部を形成してセンサとし
、測定1jl境中の湿度に対応して多孔質ガラス内に吸
着された水分量を光ファイバーを通して投射され、多孔
質ガラス内を通り、鏡面部で反射された光の減衰量を測
定することにより、測定環境中の湿度を測定しようとす
るものである。
[Means for Solving the Problem 1] The present invention forms a porous glass portion as a moisture adsorption carrier at the tip of an optical fiber, and forms a mirror surface portion such as a metal coating on the surface of this porous glass portion to create a sensor. By measuring the amount of moisture adsorbed in the porous glass according to the humidity in the measurement condition, the attenuation of the light that is projected through the optical fiber, passes through the porous glass, and is reflected by the mirror surface. , which attempts to measure the humidity in the measurement environment.

ここで、吸着水分量を澗定量を測定するための光を水の
吸収帯を有する赤外線とすることにより、より検出感度
を増すことが出来る。
Here, by using infrared light having an absorption band of water as the light for measuring the amount of adsorbed water, detection sensitivity can be further increased.

さらに、光の赤外線領域のうち2波長を選択し、1波長
を水の吸収帯に設定し、もう1波長を水の非吸収帯に設
定することにより、外乱要素、による影響を排除するこ
とが出来る。
Furthermore, by selecting two wavelengths in the infrared region of light, setting one wavelength in the absorption band of water and the other wavelength in the non-absorption band of water, it is possible to eliminate the influence of disturbance elements. I can do it.

[作用] 上記のように構成された湿度計では、湿度環境下に設置
されるのが、センサである多孔質ガラス部分と、信号伝
送部である光ファイバーの一部分となる。その結果、湿
度検出部の熱容量はきわめて小さくなり、温度に対する
追従性が良くなり、温度の関数である湿度に対する追従
性も良くなる。
[Function] In the hygrometer configured as described above, the porous glass portion serving as the sensor and a portion of the optical fiber serving as the signal transmission portion are installed in a humid environment. As a result, the heat capacity of the humidity detection section becomes extremely small, and the ability to follow temperature is improved, and the ability to follow humidity, which is a function of temperature, is also improved.

また、光ファイバーを、水分を吸着しないテフロンで被
覆することにより、湿度測定環境下に置かれた光ファイ
バー表面の水分の、吸脱着による誤差を取り除くことが
できる。
Furthermore, by coating the optical fiber with Teflon, which does not absorb moisture, it is possible to eliminate errors caused by adsorption and desorption of moisture on the surface of the optical fiber placed in a humidity measurement environment.

さらに、光ファイバーを用いて信り伝送を11うことに
より、湿度測定環境下に電気回路を持ち込まず、電気的
リークによる経時的な故障、破損を根本的に解決し、耐
熱性を向上せしめ、本質安全防爆をも満足するものとな
る。
Furthermore, by using optical fiber for reliable transmission, we do not bring electrical circuits into the humidity measurement environment, fundamentally solving failures and damage caused by electrical leaks over time, and improving heat resistance. It also satisfies explosion-proof safety.

[実施例] 実施例について図面を参照して訂2明すると、第1図に
おいて、信号伝送線である光ファイバー7.10.70
の先端に、第2図で示す水分吸着担体としての多孔質ガ
ラスのセンサ8を形成し、その端面に金属被覆などによ
る鏡面部9を形成する。
[Example] To clarify the example with reference to the drawings, in Fig. 1, an optical fiber 7.10.70 which is a signal transmission line is
A porous glass sensor 8 as a moisture adsorption carrier shown in FIG. 2 is formed at the tip of the sensor 8, and a mirror surface portion 9 made of metal coating or the like is formed on the end surface.

湿度計本体5の、電球などの発光部6から出た光は、レ
ンズ61、ミラー62等を介し投光側光ファイバー7を
通って光ファイバー70の先端の多孔質ガラスのセンサ
8の中に投射され、多孔質ガラス端面の鏡面部って反射
され、受光側光ファイバー10を通って湿度計本体5に
戻る。
Light emitted from a light emitting part 6 such as a light bulb in the hygrometer body 5 passes through a lens 61, a mirror 62, etc., passes through a light-emitting optical fiber 7, and is projected into a porous glass sensor 8 at the tip of an optical fiber 70. The light is reflected by the mirror surface of the end surface of the porous glass and returns to the hygrometer main body 5 through the light-receiving optical fiber 10.

この時、投射された光の水の吸収帯の波長は、多孔質ガ
ラスのセンサ1の中に吸着された水により吸収され、水
の非吸収帯の波長に対して著しく減衰する。
At this time, the wavelength of the water absorption band of the projected light is absorbed by the water adsorbed in the porous glass sensor 1, and is significantly attenuated compared to the wavelength of water's non-absorption band.

受光側・光ファイバー10を通って湿度計本体5に戻っ
た光は、モータ13により回転するセクタ11上に設け
られた光ファイバー11aを通って、第3図の、例えば
3μmの水の吸収帯波長の光と、例えば1.6μmの水
の非吸収帯波長の光に分けられ、交互にフォトダイオー
ドなどの受光部12に照射され、電気信号に変換され、
演算手1段14でこの2波長についての出力信号の比演
騨などの演樟処理を経て、表示手段15に湿度の直とし
て表示され、また、信号出力として、他の機器に伝送さ
れる。なお、投光側にセクタ11を設け、2波長の光を
投光するようにしてもよい。
The light that returns to the hygrometer main body 5 through the light-receiving side/optical fiber 10 passes through the optical fiber 11a provided on the sector 11 rotated by the motor 13, and then passes through the optical fiber 11a provided on the sector 11 rotated by the motor 13, and then passes through the optical fiber 11a provided on the sector 11, which is rotated by the motor 13. The light is divided into light and light having a wavelength in the non-absorption band of water, for example 1.6 μm, and is alternately irradiated onto a light receiving unit 12 such as a photodiode, and converted into an electrical signal.
The output signal for these two wavelengths is subjected to calculation processing such as ratio calculation in the calculation means 14, and then displayed on the display means 15 as a humidity value, and is also transmitted to other equipment as a signal output. Note that the sector 11 may be provided on the light projection side to project light of two wavelengths.

[発明の効果1 以上のように構成された湿度計では、湿度環境下に32
 ’IIされるのが、センナである多孔質ガラス部分と
、信号伝送部である光ファイバーの一部分となる。その
結果、湿度検出部の熱容量はきわめて小さくなり、温度
に対する追従性が良くなり、温度の関数である湿度に対
する追従性も良くなる。
[Effect of the invention 1] The hygrometer configured as described above has a
What will be removed are the porous glass part, which is the senna, and a part of the optical fiber, which is the signal transmission part. As a result, the heat capacity of the humidity detection section becomes extremely small, and the ability to follow temperature is improved, and the ability to follow humidity, which is a function of temperature, is also improved.

また、光ファイバーを、水分を吸着しないテフロンでM
覆することにより、湿度測定環境下に置かれた光ファイ
バー表面の、水分の吸11i Wによる誤差を取り除く
ことができる。
In addition, optical fibers are coated with Teflon, which does not absorb moisture.
By overturning, it is possible to eliminate errors caused by moisture absorption on the surface of the optical fiber placed in a humidity measurement environment.

さらに、光ファイバーを用いて1:号伝送を行うことに
より、湿度測定環境下に電気回路を持ち込まず、電気的
なリークによる経時的な故障、破屓を根本的に解決し、
耐熱性を向上せしめ、本質安全防爆をも満足するものと
なる。
Furthermore, by using optical fiber to transmit No. 1, no electrical circuits are brought into the humidity measurement environment, which fundamentally solves the problem of failures and deterioration over time due to electrical leaks.
It improves heat resistance and satisfies intrinsically safe explosion protection.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図、第2図は本発明の一実施例を示す構成説明図、
第3図は赤外線波長域の水の吸収特性図、第4図は従来
例の説明図である。
1 and 2 are configuration explanatory diagrams showing one embodiment of the present invention,
FIG. 3 is a diagram showing the absorption characteristics of water in the infrared wavelength region, and FIG. 4 is an explanatory diagram of a conventional example.

Claims (1)

【特許請求の範囲】 1、光ファイバー先端に形成された水分吸着担体として
の多孔質ガラスと、この多孔質ガラスの端面に形成され
た鏡面部と、光ファイバーを通して光を投射する発光部
と、多孔質ガラス端面の鏡面部で反射された光を受ける
受光部と、この受光部の出力から湿度を演算する演算手
段とを備えたことを特徴とする湿度計。 2、光ファイバーを通して投射する光を、水の吸収帯を
有する赤外線とする請求項1記載の湿度計。 3、光ファイバーを通して投射する赤外線を、水の吸収
帯の波長と、水の非吸収帯の波長の2波長とする請求項
2記載の湿度計。
[Claims] 1. Porous glass as a moisture adsorption carrier formed at the tip of an optical fiber, a mirror surface portion formed on the end surface of this porous glass, a light emitting portion that projects light through the optical fiber, and a porous glass A hygrometer comprising: a light-receiving section that receives light reflected by a mirror surface of a glass end surface; and a calculation means that calculates humidity from the output of the light-receiving section. 2. The hygrometer according to claim 1, wherein the light projected through the optical fiber is infrared rays having an absorption band of water. 3. The hygrometer according to claim 2, wherein the infrared rays projected through the optical fiber have two wavelengths: one in the absorption band of water and one in the non-absorption band of water.
JP63215758A 1988-08-30 1988-08-30 Hygrometer Pending JPH0262936A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63215758A JPH0262936A (en) 1988-08-30 1988-08-30 Hygrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63215758A JPH0262936A (en) 1988-08-30 1988-08-30 Hygrometer

Publications (1)

Publication Number Publication Date
JPH0262936A true JPH0262936A (en) 1990-03-02

Family

ID=16677741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63215758A Pending JPH0262936A (en) 1988-08-30 1988-08-30 Hygrometer

Country Status (1)

Country Link
JP (1) JPH0262936A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5752905A (en) * 1996-07-02 1998-05-19 National Science Council Automatic tool-changing mechanism
US6245003B1 (en) * 1997-09-12 2001-06-12 Bridgeport Machines Limited Tool carousel
WO2013157217A1 (en) * 2012-04-19 2013-10-24 パナソニック株式会社 Device for detecting fluctuation in moisture content, method for detecting fluctuation in moisture content, vacuum gauge, and method for detecting fluctuation in vacuum degree

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58208646A (en) * 1982-05-28 1983-12-05 Yoshio Kano Method and apparatus for measuring water content ratio in soil

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58208646A (en) * 1982-05-28 1983-12-05 Yoshio Kano Method and apparatus for measuring water content ratio in soil

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5752905A (en) * 1996-07-02 1998-05-19 National Science Council Automatic tool-changing mechanism
US6245003B1 (en) * 1997-09-12 2001-06-12 Bridgeport Machines Limited Tool carousel
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