JPH026271U - - Google Patents
Info
- Publication number
- JPH026271U JPH026271U JP8549088U JP8549088U JPH026271U JP H026271 U JPH026271 U JP H026271U JP 8549088 U JP8549088 U JP 8549088U JP 8549088 U JP8549088 U JP 8549088U JP H026271 U JPH026271 U JP H026271U
- Authority
- JP
- Japan
- Prior art keywords
- base plate
- probe
- semiconductor device
- support member
- periphery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000523 sample Substances 0.000 claims description 5
- 238000007689 inspection Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8549088U JPH026271U (cs) | 1988-06-27 | 1988-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8549088U JPH026271U (cs) | 1988-06-27 | 1988-06-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH026271U true JPH026271U (cs) | 1990-01-16 |
Family
ID=31310158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8549088U Pending JPH026271U (cs) | 1988-06-27 | 1988-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH026271U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54181005U (cs) * | 1978-06-12 | 1979-12-21 |
-
1988
- 1988-06-27 JP JP8549088U patent/JPH026271U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54181005U (cs) * | 1978-06-12 | 1979-12-21 |