JPH0261959U - - Google Patents
Info
- Publication number
- JPH0261959U JPH0261959U JP14291988U JP14291988U JPH0261959U JP H0261959 U JPH0261959 U JP H0261959U JP 14291988 U JP14291988 U JP 14291988U JP 14291988 U JP14291988 U JP 14291988U JP H0261959 U JPH0261959 U JP H0261959U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- section
- transport
- line
- blow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 20
- 238000001514 detection method Methods 0.000 claims description 8
- 230000032258 transport Effects 0.000 claims 11
- 239000007788 liquid Substances 0.000 claims 3
- 239000007921 spray Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14291988U JPH0261959U (cs) | 1988-10-31 | 1988-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14291988U JPH0261959U (cs) | 1988-10-31 | 1988-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0261959U true JPH0261959U (cs) | 1990-05-09 |
Family
ID=31409272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14291988U Pending JPH0261959U (cs) | 1988-10-31 | 1988-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0261959U (cs) |
-
1988
- 1988-10-31 JP JP14291988U patent/JPH0261959U/ja active Pending
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