JPH0261959U - - Google Patents

Info

Publication number
JPH0261959U
JPH0261959U JP14291988U JP14291988U JPH0261959U JP H0261959 U JPH0261959 U JP H0261959U JP 14291988 U JP14291988 U JP 14291988U JP 14291988 U JP14291988 U JP 14291988U JP H0261959 U JPH0261959 U JP H0261959U
Authority
JP
Japan
Prior art keywords
etching
section
transport
line
blow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14291988U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14291988U priority Critical patent/JPH0261959U/ja
Publication of JPH0261959U publication Critical patent/JPH0261959U/ja
Pending legal-status Critical Current

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  • ing And Chemical Polishing (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図、第2図及び第3図は本考案エツチング
装置の概略図、第4図は従来のエツチング装置の
概略図、第5図及び第6図は輸送部の斜視図、第
7図Aはエツチング処理前のエツチング検知状況
を示す概略図、第7図Bはエツチング終了時のエ
ツチング検知状況を示す概略図である。 1……駆動軸、3……コンベア、4……被エツ
チング体、6……吹き出し部、7……エツチング
検知部、8……エツチング終了検知部、9……電
磁バルブ付吹き出し部、10……吹き出し制御部
、12,15……輸送制御部。
1, 2, and 3 are schematic diagrams of the etching apparatus of the present invention; FIG. 4 is a schematic diagram of a conventional etching apparatus; FIGS. 5 and 6 are perspective views of the transport section; and FIG. 7A. 7B is a schematic diagram showing the etching detection state before etching processing, and FIG. 7B is a schematic diagram showing the etching detection state after etching is completed. DESCRIPTION OF SYMBOLS 1... Drive shaft, 3... Conveyor, 4... Etched object, 6... Blowout section, 7... Etching detection section, 8... Etching end detection section, 9... Blowout section with electromagnetic valve, 10... ...Blowout control section, 12, 15... Transportation control section.

Claims (1)

【実用新案登録請求の範囲】 (1) 複数個の被エツチング体を連続的且つライ
ン状に送る輸送部、該輸送部のラインに添つて配
置しエツチング液をシヤワー状に吹き付ける吹き
出し部、上記輸送部のラインに添つて複数個のセ
ンサを配置してエツチング状況を検知するエツチ
ング検知部、該エツチング検知部より得られた信
号により前記吹き出し部のエツチング液吹き出し
量を加減できる吹き出し制御部を備えたことを特
徴とするエツチング装置。 (2) 複数個の被エツチング体を連続的且つライ
ン状に送る輸送部、該輸送部のラインに添つて配
置しエツチング液をシヤワー状に吹き付ける吹き
出し部、上記輸送部のラインに添つて複数個のセ
ンサを配置してエツチング状況を検知するエツチ
ング検知部、該エツチング検知部より得られた信
号により前記輸送部の輸送速度を制御できる輸送
制御部を備えたことを特徴とするエツチング装置
[Claims for Utility Model Registration] (1) A transport unit that continuously and linearly transports a plurality of objects to be etched, a blow-off unit that is arranged along the line of the transport unit and sprays etching liquid in a shower-like manner, and the above-mentioned transport unit. an etching detection section that detects the etching situation by arranging a plurality of sensors along the etching line; and a blowout control section that can adjust the amount of etching liquid blown out from the blowout section based on a signal obtained from the etching detection section. An etching device characterized by: (2) A transport section that continuously and linearly transports a plurality of objects to be etched, a blow-off section that is arranged along the line of the transport section and sprays etching liquid in a shower-like manner, and a plurality of blow-off sections that are arranged along the line of the transport section. An etching apparatus comprising: an etching detection section for detecting etching conditions by disposing a sensor; and a transport control section capable of controlling the transport speed of the transport section based on a signal obtained from the etching detection section.
JP14291988U 1988-10-31 1988-10-31 Pending JPH0261959U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14291988U JPH0261959U (en) 1988-10-31 1988-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14291988U JPH0261959U (en) 1988-10-31 1988-10-31

Publications (1)

Publication Number Publication Date
JPH0261959U true JPH0261959U (en) 1990-05-09

Family

ID=31409272

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14291988U Pending JPH0261959U (en) 1988-10-31 1988-10-31

Country Status (1)

Country Link
JP (1) JPH0261959U (en)

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