JPH0261482A - Method and device for manufacturing ultra-high purity nitrogen - Google Patents
Method and device for manufacturing ultra-high purity nitrogenInfo
- Publication number
- JPH0261482A JPH0261482A JP20837888A JP20837888A JPH0261482A JP H0261482 A JPH0261482 A JP H0261482A JP 20837888 A JP20837888 A JP 20837888A JP 20837888 A JP20837888 A JP 20837888A JP H0261482 A JPH0261482 A JP H0261482A
- Authority
- JP
- Japan
- Prior art keywords
- nitrogen
- sub
- heat exchanger
- rectification column
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 title claims abstract description 131
- 229910052757 nitrogen Inorganic materials 0.000 title claims abstract description 59
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 238000000034 method Methods 0.000 title abstract description 4
- 229910001873 dinitrogen Inorganic materials 0.000 claims abstract description 13
- 239000007788 liquid Substances 0.000 claims abstract description 13
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000001301 oxygen Substances 0.000 claims abstract description 12
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 12
- 239000007789 gas Substances 0.000 claims abstract description 10
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims abstract 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 12
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 6
- 239000001569 carbon dioxide Substances 0.000 claims description 6
- 239000002994 raw material Substances 0.000 claims description 2
- 238000001816 cooling Methods 0.000 claims 1
- 230000001174 ascending effect Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 3
- 238000010992 reflux Methods 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000009835 boiling Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001757 thermogravimetry curve Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
- F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
- F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
- F25J3/04333—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using quasi-closed loop internal vapor compression refrigeration cycles, e.g. of intermediate or oxygen enriched (waste-)streams
- F25J3/04351—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using quasi-closed loop internal vapor compression refrigeration cycles, e.g. of intermediate or oxygen enriched (waste-)streams of nitrogen
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
- F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
- F25J3/04151—Purification and (pre-)cooling of the feed air; recuperative heat-exchange with product streams
- F25J3/04187—Cooling of the purified feed air by recuperative heat-exchange; Heat-exchange with product streams
- F25J3/04218—Parallel arrangement of the main heat exchange line in cores having different functions, e.g. in low pressure and high pressure cores
- F25J3/04224—Cores associated with a liquefaction or refrigeration cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
- F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
- F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
- F25J3/04284—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using internal refrigeration by open-loop gas work expansion, e.g. of intermediate or oxygen enriched (waste-)streams
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
- F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
- F25J3/044—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air using a single pressure main column system only
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2200/00—Processes or apparatus using separation by rectification
- F25J2200/30—Processes or apparatus using separation by rectification using a side column in a single pressure column system
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2215/00—Processes characterised by the type or other details of the product stream
- F25J2215/42—Nitrogen or special cases, e.g. multiple or low purity N2
- F25J2215/44—Ultra high purity nitrogen, i.e. generally less than 1 ppb impurities
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2220/00—Processes or apparatus involving steps for the removal of impurities
- F25J2220/42—Separating low boiling, i.e. more volatile components from nitrogen, e.g. He, H2, Ne
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Separation By Low-Temperature Treatments (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、超高純度窒素の製造方法及び装置に係り、特
に窒素中の不純物である酸素が１ ｆ）Ｉ）ｂ程度の超
高純度窒素を製造するのに好適な超高純度窒素の製造方
法及び装置に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a method and apparatus for producing ultra-high purity nitrogen, and particularly to ultra-high purity nitrogen with an impurity of oxygen in nitrogen of about 1 f) I) b. The present invention relates to a method and apparatus for producing ultra-high purity nitrogen suitable for producing nitrogen.
従来の窒素製造装置は、第２図に示すごとく原料空気を
原料空気圧Ｍ機１で昇圧し、アフターク−クーで冷却後
、吸着塔３で水分および炭酸ガスを除去した後、空気熱
交４で冷却され、精留塔５に入り精留される。製品窒素
ガスは精留塔５の上部から取出され、空気熱交４で常温
まで温度回復し製品として採取される。精留塔下部の液
体空気は凝縮器６でガス化した後、膨張タービン７で大
気圧まで膨張し、空気熱交４で常温まで温度回復して大
気に放出される。なお、この種の装置として関連するも
のには例えば特開昭５１−４８７９３号等が挙げられる
。In the conventional nitrogen production equipment, as shown in Fig. 2, feed air is pressurized in a feed air pressure M machine 1, cooled in an after-cooler, water and carbon dioxide are removed in an adsorption tower 3, and then heated in an air heat exchanger 4. It is cooled, enters the rectification column 5, and is rectified. The product nitrogen gas is taken out from the upper part of the rectification column 5, and the temperature is recovered to room temperature in the air heat exchanger 4, and the product is collected as a product. The liquid air at the bottom of the rectification column is gasified in a condenser 6, expanded to atmospheric pressure in an expansion turbine 7, and then recovered to room temperature in an air heat exchanger 4 and released into the atmosphere. Incidentally, related devices of this type include, for example, Japanese Patent Application Laid-Open No. 51-48793.
上記従来技術は超高純度窒素の製造について配慮がされ
ておらず、酸素弁を２１％含む原料空気を精留するため
、製品窒素ガス中の酸素弁は通常的ｌｐｐｍであり、精
留塔段数を増やしても０．ｌｐｐｍ以下にする二とがで
きなかった。The above conventional technology does not take into account the production of ultra-high purity nitrogen, and since the feed air containing 21% oxygen valve is rectified, the oxygen valve in the product nitrogen gas is usually lppm, and the number of rectification column plates is Even if you increase 0. It was not possible to reduce the amount to below lppm.
本発明の目的は超Ｌ８Ｉ生産技術に必要な酸素弁１ｐｐ
ｂ以下の超高純度の窒素を製造できる製造方法及び装置
を提供することにある。The purpose of the present invention is to produce a 1pp oxygen valve necessary for ultra-L8I production technology.
An object of the present invention is to provide a manufacturing method and apparatus capable of manufacturing nitrogen with an ultra-high purity of B or less.
上記目的は、精留塔で租精留された窒素ガスを副精留塔
で更に精留することにより達成される。The above object is achieved by further rectifying the nitrogen gas that has been rectified in the rectifier in a sub-rectifier.
副精留塔で精留を行なうために、窒素昇圧機、窒素熱交
、副精留塔および副凝縮器より成る窒素循環回路を設け
、副精留塔上昇ガスを副凝縮器で凝縮させてｊｊｔ流液
とし精留を行なうことにより、達成される。In order to perform rectification in the sub-rectifier, a nitrogen circulation circuit consisting of a nitrogen booster, nitrogen heat exchanger, sub-rectifier and sub-condenser is installed, and the gas rising in the sub-rectifier is condensed in the sub-condenser. This is achieved by converting the liquid into a liquid and performing rectification.
精留塔で粗精留されて取出された酸素公約ｌｐｐｍの窒
素ガスは、副精留塔の下部に導入され副精留塔で更に精
留されるので、副精留塔の上部から酸素弁１ ｐｐｂ以
下の超高純度窒素が採取できる。Nitrogen gas containing approximately 1 ppm of oxygen, which is crudely rectified and taken out in the rectifier, is introduced into the lower part of the sub-rectifier and further rectified in the sub-rectifier. Ultra-high purity nitrogen of 1 ppb or less can be collected.
副精留塔で精留分離される不純物は、酸素が主体である
が、窒素より沸点の高い水分、炭酸ガス。The impurities that are separated by rectification in the sub-rectification column are mainly oxygen, but also water and carbon dioxide gas, which have a higher boiling point than nitrogen.
−酸化窒素、炭化水素等も１ｐｐｂ以下にすることがで
きる。- Nitrogen oxides, hydrocarbons, etc. can also be reduced to 1 ppb or less.
以下、本発明の一実施例を第１図により説明する。 An embodiment of the present invention will be described below with reference to FIG.
図において、原料空気は原料空気圧縮機ｌにより約８
Ｋ９／ ｃＩＩＧに昇圧され、アフタークーラー２で冷
却された後、吸着Ｎ！３に導かれて水分および炭酸ガス
が吸着除去される。吸着塔３を出た原料空気は空気熱交
４で冷却され、一部液化した状態で精留塔５の下部に入
り精留される。精留塔５の上部から約ｌｐｐｍの窒素が
、大部分は導管８を通してガス状で一部は導管９を通し
て液状で、副精留塔ｌＯの下部に導入され、更に精留さ
れる。In the figure, the raw air is supplied by the raw air compressor l to approximately 8.
After being pressurized to K9/cIIG and cooled by aftercooler 2, adsorption N! 3, where moisture and carbon dioxide are adsorbed and removed. The raw air leaving the adsorption tower 3 is cooled by an air heat exchanger 4, and enters the lower part of the rectification tower 5 in a partially liquefied state to be rectified. About 1 ppm of nitrogen is introduced from the upper part of the rectifying column 5, mostly in gaseous form through conduit 8 and partly in liquid form through conduit 9, into the lower part of sub-rectifying column 1O, where it is further rectified.
副精留ＭＩＯの上昇ガスおよび環流液を作るため、窒素
昇圧ｆｉ １１ 、アフタークーラーＬ、窒素熱交１３
゜副精留塔１０．副凝縮器１４より成る窒素循環回路を
付設している。副精留塔ｌＯの下部より取出された約２
０ｐｐｍの液体窒素は副凝縮器１４でガス化された後、
窒素熱交１３で常温まで温度回復され、導管８および導
管９を通して副精留塔１０に供給された窒素量の約５％
が導管巧より不純窯素として大気放出される。残りの大
部分の窒素ガスは、窒素昇圧機１１で約５．５Ｋｐ／ｃ
ｄＧから約７．５にｙ ／ ｃｓ！ Ｇに昇圧され、ア
フタークーラージで約４０℃まで冷却された後窒素熱交
１３で約−１７３℃まで冷却されて副精留塔１０の下部
に戻る。In order to make the rising gas and reflux liquid of sub-rectification MIO, nitrogen pressurization fi 11, aftercooler L, nitrogen heat exchanger 13 are used.
゜Sub-rectification column 10. A nitrogen circulation circuit consisting of a sub-condenser 14 is attached. Approximately 2
After the 0 ppm liquid nitrogen is gasified in the sub-condenser 14,
Approximately 5% of the nitrogen amount recovered to room temperature in the nitrogen heat exchanger 13 and supplied to the sub-rectification column 10 through conduits 8 and 9
is released into the atmosphere as impure kiln element from the conduit. Most of the remaining nitrogen gas is pumped to the nitrogen booster 11 at approximately 5.5Kp/c.
y/cs from dG to about 7.5! It is pressurized to G, cooled to about 40° C. in an aftercooler, cooled to about −173° C. in a nitrogen heat exchanger 13, and returned to the lower part of the sub-rectification column 10.
副精留塔ｌＯの上部より取出された酸素弁１ｐｐｂ以下
の超高純度窒素ガスは、導管１６を介して空気熱交４で
常温まで温度回復し、約６．５ Ｋ９ ／ｃｆｆｌ Ｇ
の超高純度窒素となり製品として採取される。The ultra-high purity nitrogen gas with an oxygen valve concentration of 1 ppb or less taken out from the upper part of the sub-rectification column 10 is returned to room temperature in the air heat exchanger 4 via the conduit 16, and is heated to about 6.5 K9/cffl G.
It becomes ultra-high purity nitrogen and is collected as a product.
本実施例によれば、酸素弁１ｐｐｂ以下の超高純度窒素
を採取することができる。また、精留塔５で空気から粗
精留された窒素を副精留塔で更に精留するので、精留塔
の運転変動に対しても安定した純度の超高純度窒素を採
取することができる。According to this embodiment, ultra-high purity nitrogen of 1 ppb or less can be collected from the oxygen valve. In addition, since the nitrogen crudely rectified from air in the rectifier 5 is further rectified in the sub-rectifier, it is possible to collect ultra-high purity nitrogen with stable purity even in the face of fluctuations in the operation of the rectifier. can.
また、窒素昇圧機Ｕの吐出流量を増減する二とにより副
精留塔ｌＯの環流比（環流液／上昇ガス）を変えること
ができるので、製品窒素ガスの純度を任意に変えること
ができる。さらに、製品窒素中の不純物は、酸素のみな
らず、水分、炭酸ガス。In addition, the reflux ratio (reflux liquid/rising gas) of the sub-rectification column IO can be changed by increasing or decreasing the discharge flow rate of the nitrogen booster U, so the purity of the product nitrogen gas can be changed arbitrarily. Furthermore, the impurities in the nitrogen product are not only oxygen, but also moisture and carbon dioxide gas.
−酸化窒素、炭化水素等も１ｐｐｂ以下にすることがで
きる。- Nitrogen oxides, hydrocarbons, etc. can also be reduced to 1 ppb or less.
本発明によれば、精留塔で租精留された窒素ガスを副精
留塔で更に精留することにより、酸素分１ｐｐｂ以下の
超高純度窒素な採皐できる効果がある。According to the present invention, by further rectifying the nitrogen gas that has been rectified in the rectifier in the sub-rectifier, ultra-high purity nitrogen with an oxygen content of 1 ppb or less can be obtained.
第１図は本発明の一実施例の超高純度窒素の製造装置の
系統図を示し、第２図は従来の窒素製造装置の系統図で
ある。
ｌ・・・・・・原料空気圧縮機、３・・・・・・吸着塔
、４・・・・・・空気熱文、５・・・・・・精留塔、７
・・・・・・膨張タービン、ｌＯ・・・・・・副精留塔
、１１・・・・・・窒素昇圧機、１３・・・・・・窯素
熱交、１４・・・・・・副凝縮器
代理人 弁理士 小 川 勝 男
４２図FIG. 1 shows a system diagram of an apparatus for producing ultra-high purity nitrogen according to an embodiment of the present invention, and FIG. 2 shows a system diagram of a conventional nitrogen production apparatus. l... Raw material air compressor, 3... Adsorption tower, 4... Air thermogram, 5... Rectification tower, 7
...... Expansion turbine, lO... Sub-rectifier, 11... Nitrogen booster, 13... Kiln heat exchanger, 14...・Subcondenser representative Patent attorney Masaru Ogawa 42
Claims (1)
液化して精留塔で精留分離する窒素製造方法において、 前記精留塔で粗精留された窒素ガスおよび液体窒素を副
精留塔に導入して更に精留し、副精留塔の上部から微量
酸素を含む超高純度窒素を取出し空気熱交で温度回復さ
せ製品として採取するとともに、副精留塔下部から取出
した液体窒素を副精留塔上部の副凝縮器でガス化させ、
窒素熱交で温度回復させ、窒素昇圧機で昇圧し、窒素熱
交で冷却し、再び副精留塔へ導入することを特徴とする
超高純度窒素の製造方法。 ２、原料空気中の水分および炭酸ガスを除去した後空気
熱交を介して精留塔で精留分離する窒素製造装置におい
て、 前記精留塔で粗精留された窒素ガスおよび液体窒素を更
に精留する副精留塔と、該副精留塔の上部に設けた副凝
縮器と、該副凝縮器でガス化したガスを常温まで温度回
復させる窒素熱交と、該窒素熱交を通った不純窒素の一
部を大気に放出し残りの大部分の窒素ガスを昇圧する窒
素昇圧機と、昇圧したガスをクーラーと前記窒素熱交を
介して前記副精留塔に戻す経路とからなる窒素循環回路
を設けると共に、副精留塔の上部から前記空気熱交を介
して製品窒素を取り出す経路を設けたことを特徴とする
超高純度窒素の製造装置。[Scope of Claims] 1. A method for producing nitrogen in which moisture and carbon dioxide gas in the raw material air are removed, then cooled and liquefied, and the nitrogen gas crudely rectified in the rectification column and Liquid nitrogen is introduced into the sub-rectification column for further rectification, and ultra-high purity nitrogen containing trace amounts of oxygen is extracted from the upper part of the sub-rectification column, temperature-recovered with an air heat exchanger, and collected as a product. The liquid nitrogen taken out from the bottom is gasified in the sub-condenser at the top of the sub-rectification column.
A method for producing ultra-high purity nitrogen, characterized by recovering the temperature with a nitrogen heat exchanger, increasing the pressure with a nitrogen booster, cooling with a nitrogen heat exchanger, and reintroducing the nitrogen into the sub-rectification column. 2. In a nitrogen production device that removes moisture and carbon dioxide from feed air and then separates it by rectification in a rectification column via air heat exchange, the nitrogen gas and liquid nitrogen crudely rectified in the rectification column are further A sub-rectification column for rectification, a sub-condenser provided at the top of the sub-condenser, a nitrogen heat exchanger for recovering the temperature of the gas gasified in the sub-condenser to room temperature, and a nitrogen heat exchanger for recovering the gas to room temperature. The nitrogen pressurizer discharges a portion of the impure nitrogen into the atmosphere and pressurizes most of the remaining nitrogen gas, and a path returns the pressurized gas to the sub-rectification column via the cooler and the nitrogen heat exchanger. An apparatus for producing ultra-high purity nitrogen, comprising a nitrogen circulation circuit and a path for taking out product nitrogen from the upper part of the sub-rectification column via the air heat exchanger.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20837888A JP2685523B2 (en) | 1988-08-24 | 1988-08-24 | Method and apparatus for producing ultra-high purity nitrogen |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20837888A JP2685523B2 (en) | 1988-08-24 | 1988-08-24 | Method and apparatus for producing ultra-high purity nitrogen |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0261482A true JPH0261482A (en) | 1990-03-01 |
| JP2685523B2 JP2685523B2 (en) | 1997-12-03 |
Family
ID=16555286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20837888A Expired - Fee Related JP2685523B2 (en) | 1988-08-24 | 1988-08-24 | Method and apparatus for producing ultra-high purity nitrogen |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2685523B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1991019142A1 (en) * | 1990-05-31 | 1991-12-12 | Kabushiki Kaisha Kobe Seiko Sho | Method of and device for producing nitrogen of high purity |
-
1988
- 1988-08-24 JP JP20837888A patent/JP2685523B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1991019142A1 (en) * | 1990-05-31 | 1991-12-12 | Kabushiki Kaisha Kobe Seiko Sho | Method of and device for producing nitrogen of high purity |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2685523B2 (en) | 1997-12-03 |
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