JPH0261053U - - Google Patents
Info
- Publication number
- JPH0261053U JPH0261053U JP14046288U JP14046288U JPH0261053U JP H0261053 U JPH0261053 U JP H0261053U JP 14046288 U JP14046288 U JP 14046288U JP 14046288 U JP14046288 U JP 14046288U JP H0261053 U JPH0261053 U JP H0261053U
- Authority
- JP
- Japan
- Prior art keywords
- electrode plate
- electrode
- magnet insertion
- grooves
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000037431 insertion Effects 0.000 claims description 4
- 238000003780 insertion Methods 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 2
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 238000005219 brazing Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14046288U JPH0614398Y2 (ja) | 1988-10-27 | 1988-10-27 | イオン源用電極 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14046288U JPH0614398Y2 (ja) | 1988-10-27 | 1988-10-27 | イオン源用電極 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0261053U true JPH0261053U (it) | 1990-05-07 |
JPH0614398Y2 JPH0614398Y2 (ja) | 1994-04-13 |
Family
ID=31404656
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14046288U Expired - Lifetime JPH0614398Y2 (ja) | 1988-10-27 | 1988-10-27 | イオン源用電極 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0614398Y2 (it) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016207480A (ja) * | 2015-04-23 | 2016-12-08 | 日新電機株式会社 | 荷電粒子源 |
-
1988
- 1988-10-27 JP JP14046288U patent/JPH0614398Y2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016207480A (ja) * | 2015-04-23 | 2016-12-08 | 日新電機株式会社 | 荷電粒子源 |
Also Published As
Publication number | Publication date |
---|---|
JPH0614398Y2 (ja) | 1994-04-13 |
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