JPH0261053U - - Google Patents
Info
- Publication number
- JPH0261053U JPH0261053U JP14046288U JP14046288U JPH0261053U JP H0261053 U JPH0261053 U JP H0261053U JP 14046288 U JP14046288 U JP 14046288U JP 14046288 U JP14046288 U JP 14046288U JP H0261053 U JPH0261053 U JP H0261053U
- Authority
- JP
- Japan
- Prior art keywords
- electrode plate
- electrode
- magnet insertion
- grooves
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000037431 insertion Effects 0.000 claims description 4
- 238000003780 insertion Methods 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 2
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 238000005219 brazing Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図はこの考案の一実施例に係る電極を部分
的に示すものであり、Ａはその断面図、Ｂはその
第２の電極板を取り除いた平面図である。第２図
は従来の電極を部分的に示すものであり、Ａはそ
の断面図、Ｂはその平面図である。
４……第１の電極板、４１……孔、４２……磁
石挿入溝、４３……溝、６……第２の電極板、６
１……孔、８……冷却パイプ、Ｓ……ロウ付け領
域。
FIG. 1 partially shows an electrode according to an embodiment of the invention, with A being a sectional view thereof and B being a plan view with the second electrode plate removed. FIG. 2 partially shows a conventional electrode, with A being a sectional view thereof and B being a plan view thereof. 4... First electrode plate, 41... Hole, 42... Magnet insertion groove, 43... Groove, 6... Second electrode plate, 6
1... Hole, 8... Cooling pipe, S... Brazing area.
Claims (1)
られる電極であつて、複数の磁石挿入溝を有しか
つ冷却パイプが設けられた第１の電極板上にその
磁石挿入溝の蓋をするように第２の電極板を重ね
たものにおいて、前記第１の電極板の各磁石挿入
溝の少なくとも長手方向に沿う両側に溝をそれぞ
れ設け、かつ第１の電極板と第２の電極板との間
をロウ付けによつて接合したことを特徴とするイ
オン源用電極。 An electrode used for extracting an ion beam in an ion source, which has a plurality of magnet insertion grooves and is provided with a cooling pipe.A second electrode plate is placed on the first electrode plate to cover the magnet insertion grooves. In a stack of electrode plates, grooves are provided at least on both sides along the longitudinal direction of each magnet insertion groove of the first electrode plate, and the first electrode plate and the second electrode plate are brazed together. An electrode for an ion source, characterized in that it is joined by.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14046288U JPH0614398Y2 (en) | 1988-10-27 | 1988-10-27 | Ion source electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14046288U JPH0614398Y2 (en) | 1988-10-27 | 1988-10-27 | Ion source electrode |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0261053U true JPH0261053U (en) | 1990-05-07 |
| JPH0614398Y2 JPH0614398Y2 (en) | 1994-04-13 |
Family
ID=31404656
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14046288U Expired - Lifetime JPH0614398Y2 (en) | 1988-10-27 | 1988-10-27 | Ion source electrode |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0614398Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016207480A (en) * | 2015-04-23 | 2016-12-08 | 日新電機株式会社 | Charged particle source |
-
1988
- 1988-10-27 JP JP14046288U patent/JPH0614398Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016207480A (en) * | 2015-04-23 | 2016-12-08 | 日新電機株式会社 | Charged particle source |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0614398Y2 (en) | 1994-04-13 |
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