JPH0260839U - - Google Patents
Info
- Publication number
- JPH0260839U JPH0260839U JP14016888U JP14016888U JPH0260839U JP H0260839 U JPH0260839 U JP H0260839U JP 14016888 U JP14016888 U JP 14016888U JP 14016888 U JP14016888 U JP 14016888U JP H0260839 U JPH0260839 U JP H0260839U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- gas
- electromagnetic valve
- filling device
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14016888U JPH0260839U (et) | 1988-10-27 | 1988-10-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14016888U JPH0260839U (et) | 1988-10-27 | 1988-10-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0260839U true JPH0260839U (et) | 1990-05-07 |
Family
ID=31404096
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14016888U Pending JPH0260839U (et) | 1988-10-27 | 1988-10-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0260839U (et) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6173049A (ja) * | 1984-09-18 | 1986-04-15 | Nippon Denso Co Ltd | 漏れ検査装置 |
-
1988
- 1988-10-27 JP JP14016888U patent/JPH0260839U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6173049A (ja) * | 1984-09-18 | 1986-04-15 | Nippon Denso Co Ltd | 漏れ検査装置 |
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