JPH0260837U - - Google Patents
Info
- Publication number
- JPH0260837U JPH0260837U JP14041288U JP14041288U JPH0260837U JP H0260837 U JPH0260837 U JP H0260837U JP 14041288 U JP14041288 U JP 14041288U JP 14041288 U JP14041288 U JP 14041288U JP H0260837 U JPH0260837 U JP H0260837U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- sensor chip
- liquid contact
- measurement
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 claims description 10
- 239000007788 liquid Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14041288U JPH073310Y2 (ja) | 1988-10-27 | 1988-10-27 | 半導体差圧測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14041288U JPH073310Y2 (ja) | 1988-10-27 | 1988-10-27 | 半導体差圧測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0260837U true JPH0260837U (fi) | 1990-05-07 |
| JPH073310Y2 JPH073310Y2 (ja) | 1995-01-30 |
Family
ID=31404556
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14041288U Expired - Lifetime JPH073310Y2 (ja) | 1988-10-27 | 1988-10-27 | 半導体差圧測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH073310Y2 (fi) |
-
1988
- 1988-10-27 JP JP14041288U patent/JPH073310Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH073310Y2 (ja) | 1995-01-30 |