JPH0260248U - - Google Patents
Info
- Publication number
- JPH0260248U JPH0260248U JP13926888U JP13926888U JPH0260248U JP H0260248 U JPH0260248 U JP H0260248U JP 13926888 U JP13926888 U JP 13926888U JP 13926888 U JP13926888 U JP 13926888U JP H0260248 U JPH0260248 U JP H0260248U
- Authority
- JP
- Japan
- Prior art keywords
- upper lid
- storage part
- wafer carrier
- handles
- bottomed frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 4
- 239000000969 carrier Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13926888U JPH0260248U (fi) | 1988-10-27 | 1988-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13926888U JPH0260248U (fi) | 1988-10-27 | 1988-10-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0260248U true JPH0260248U (fi) | 1990-05-02 |
Family
ID=31402370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13926888U Pending JPH0260248U (fi) | 1988-10-27 | 1988-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0260248U (fi) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011054799A (ja) * | 2009-09-02 | 2011-03-17 | Gold Kogyo Kk | 精密基板収納容器 |
| JP2011249372A (ja) * | 2010-05-24 | 2011-12-08 | Shin Etsu Polymer Co Ltd | 基板収納容器 |
-
1988
- 1988-10-27 JP JP13926888U patent/JPH0260248U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011054799A (ja) * | 2009-09-02 | 2011-03-17 | Gold Kogyo Kk | 精密基板収納容器 |
| JP2011249372A (ja) * | 2010-05-24 | 2011-12-08 | Shin Etsu Polymer Co Ltd | 基板収納容器 |