JPH0260239U - - Google Patents

Info

Publication number
JPH0260239U
JPH0260239U JP13851988U JP13851988U JPH0260239U JP H0260239 U JPH0260239 U JP H0260239U JP 13851988 U JP13851988 U JP 13851988U JP 13851988 U JP13851988 U JP 13851988U JP H0260239 U JPH0260239 U JP H0260239U
Authority
JP
Japan
Prior art keywords
positional deviation
die
stage
deviation correction
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13851988U
Other languages
English (en)
Japanese (ja)
Other versions
JPH085551Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988138519U priority Critical patent/JPH085551Y2/ja
Publication of JPH0260239U publication Critical patent/JPH0260239U/ja
Application granted granted Critical
Publication of JPH085551Y2 publication Critical patent/JPH085551Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Die Bonding (AREA)
JP1988138519U 1988-10-24 1988-10-24 ダイの位置ずれ補正装置 Expired - Lifetime JPH085551Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988138519U JPH085551Y2 (ja) 1988-10-24 1988-10-24 ダイの位置ずれ補正装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988138519U JPH085551Y2 (ja) 1988-10-24 1988-10-24 ダイの位置ずれ補正装置

Publications (2)

Publication Number Publication Date
JPH0260239U true JPH0260239U (US20100056889A1-20100304-C00004.png) 1990-05-02
JPH085551Y2 JPH085551Y2 (ja) 1996-02-14

Family

ID=31400931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988138519U Expired - Lifetime JPH085551Y2 (ja) 1988-10-24 1988-10-24 ダイの位置ずれ補正装置

Country Status (1)

Country Link
JP (1) JPH085551Y2 (US20100056889A1-20100304-C00004.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60248323A (ja) * 1984-05-25 1985-12-09 松下電工株式会社 ダイボンダ−のセンタリング装置
JPS62219537A (ja) * 1986-03-19 1987-09-26 Mitsubishi Electric Corp 半導体製造装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60248323A (ja) * 1984-05-25 1985-12-09 松下電工株式会社 ダイボンダ−のセンタリング装置
JPS62219537A (ja) * 1986-03-19 1987-09-26 Mitsubishi Electric Corp 半導体製造装置

Also Published As

Publication number Publication date
JPH085551Y2 (ja) 1996-02-14

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