JPH0260229U - - Google Patents

Info

Publication number
JPH0260229U
JPH0260229U JP13818188U JP13818188U JPH0260229U JP H0260229 U JPH0260229 U JP H0260229U JP 13818188 U JP13818188 U JP 13818188U JP 13818188 U JP13818188 U JP 13818188U JP H0260229 U JPH0260229 U JP H0260229U
Authority
JP
Japan
Prior art keywords
wafer
shielding means
lens system
exposure apparatus
source section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13818188U
Other languages
English (en)
Japanese (ja)
Other versions
JPH069487Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988138181U priority Critical patent/JPH069487Y2/ja
Publication of JPH0260229U publication Critical patent/JPH0260229U/ja
Application granted granted Critical
Publication of JPH069487Y2 publication Critical patent/JPH069487Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988138181U 1988-10-25 1988-10-25 ウェハ周辺露光装置 Expired - Lifetime JPH069487Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988138181U JPH069487Y2 (ja) 1988-10-25 1988-10-25 ウェハ周辺露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988138181U JPH069487Y2 (ja) 1988-10-25 1988-10-25 ウェハ周辺露光装置

Publications (2)

Publication Number Publication Date
JPH0260229U true JPH0260229U (US20080094685A1-20080424-C00004.png) 1990-05-02
JPH069487Y2 JPH069487Y2 (ja) 1994-03-09

Family

ID=31400283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988138181U Expired - Lifetime JPH069487Y2 (ja) 1988-10-25 1988-10-25 ウェハ周辺露光装置

Country Status (1)

Country Link
JP (1) JPH069487Y2 (US20080094685A1-20080424-C00004.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6060724A (ja) * 1983-09-14 1985-04-08 Toshiba Corp 半導体露光装置
JPS6173330A (ja) * 1984-09-18 1986-04-15 Nec Corp 半導体デバイス製造装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6060724A (ja) * 1983-09-14 1985-04-08 Toshiba Corp 半導体露光装置
JPS6173330A (ja) * 1984-09-18 1986-04-15 Nec Corp 半導体デバイス製造装置

Also Published As

Publication number Publication date
JPH069487Y2 (ja) 1994-03-09

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