JPH025873U - - Google Patents
Info
- Publication number
- JPH025873U JPH025873U JP8427888U JP8427888U JPH025873U JP H025873 U JPH025873 U JP H025873U JP 8427888 U JP8427888 U JP 8427888U JP 8427888 U JP8427888 U JP 8427888U JP H025873 U JPH025873 U JP H025873U
- Authority
- JP
- Japan
- Prior art keywords
- cooling medium
- attached
- disk
- cooling
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002826 coolant Substances 0.000 claims description 8
- 238000001816 cooling Methods 0.000 claims description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988084278U JPH0728692Y2 (ja) | 1988-06-25 | 1988-06-25 | ウエハディスク |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988084278U JPH0728692Y2 (ja) | 1988-06-25 | 1988-06-25 | ウエハディスク |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH025873U true JPH025873U (en, 2012) | 1990-01-16 |
| JPH0728692Y2 JPH0728692Y2 (ja) | 1995-06-28 |
Family
ID=31308974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988084278U Expired - Lifetime JPH0728692Y2 (ja) | 1988-06-25 | 1988-06-25 | ウエハディスク |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0728692Y2 (en, 2012) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4919518U (en, 2012) * | 1972-05-18 | 1974-02-19 | ||
| JP2009266391A (ja) * | 2008-04-22 | 2009-11-12 | Sumco Corp | 酸素イオン注入装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61116746A (ja) * | 1984-09-19 | 1986-06-04 | アプライド マテリアルズ インコ−ポレ−テツド | 半導体ウエハをイオンインプランテ−シヨンする装置及び方法 |
-
1988
- 1988-06-25 JP JP1988084278U patent/JPH0728692Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61116746A (ja) * | 1984-09-19 | 1986-06-04 | アプライド マテリアルズ インコ−ポレ−テツド | 半導体ウエハをイオンインプランテ−シヨンする装置及び方法 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4919518U (en, 2012) * | 1972-05-18 | 1974-02-19 | ||
| JP2009266391A (ja) * | 2008-04-22 | 2009-11-12 | Sumco Corp | 酸素イオン注入装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0728692Y2 (ja) | 1995-06-28 |