JPH0258334U - - Google Patents
Info
- Publication number
- JPH0258334U JPH0258334U JP13647388U JP13647388U JPH0258334U JP H0258334 U JPH0258334 U JP H0258334U JP 13647388 U JP13647388 U JP 13647388U JP 13647388 U JP13647388 U JP 13647388U JP H0258334 U JPH0258334 U JP H0258334U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- lever
- ring
- loading
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims 4
Landscapes
- Tests Of Electronic Circuits (AREA)
- Discharge Of Articles From Conveyors (AREA)
- Intermediate Stations On Conveyors (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13647388U JPH0625010Y2 (ja) | 1988-10-19 | 1988-10-19 | ウエハの受渡し機構 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13647388U JPH0625010Y2 (ja) | 1988-10-19 | 1988-10-19 | ウエハの受渡し機構 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0258334U true JPH0258334U (US07579456-20090825-P00002.png) | 1990-04-26 |
JPH0625010Y2 JPH0625010Y2 (ja) | 1994-06-29 |
Family
ID=31397018
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13647388U Expired - Fee Related JPH0625010Y2 (ja) | 1988-10-19 | 1988-10-19 | ウエハの受渡し機構 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0625010Y2 (US07579456-20090825-P00002.png) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002164423A (ja) * | 2000-11-28 | 2002-06-07 | Tokyo Seimitsu Co Ltd | ウェーハリフト装置を備えたウェーハ保持装置 |
JP2007158005A (ja) * | 2005-12-05 | 2007-06-21 | Tokyo Electron Ltd | 基板搬送装置及び基板処理装置 |
WO2017094462A1 (ja) * | 2015-12-03 | 2017-06-08 | 日本電気硝子株式会社 | 板ガラスの製造方法及び製造装置 |
-
1988
- 1988-10-19 JP JP13647388U patent/JPH0625010Y2/ja not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002164423A (ja) * | 2000-11-28 | 2002-06-07 | Tokyo Seimitsu Co Ltd | ウェーハリフト装置を備えたウェーハ保持装置 |
JP2007158005A (ja) * | 2005-12-05 | 2007-06-21 | Tokyo Electron Ltd | 基板搬送装置及び基板処理装置 |
WO2017094462A1 (ja) * | 2015-12-03 | 2017-06-08 | 日本電気硝子株式会社 | 板ガラスの製造方法及び製造装置 |
CN108025415A (zh) * | 2015-12-03 | 2018-05-11 | 日本电气硝子株式会社 | 板状玻璃的制造方法以及制造装置 |
TWI683774B (zh) * | 2015-12-03 | 2020-02-01 | 日商日本電氣硝子股份有限公司 | 平板玻璃的製造方法及製造裝置 |
CN108025415B (zh) * | 2015-12-03 | 2020-03-17 | 日本电气硝子株式会社 | 板状玻璃的制造方法以及制造装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0625010Y2 (ja) | 1994-06-29 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |