JPH0257935U - - Google Patents
Info
- Publication number
- JPH0257935U JPH0257935U JP12199188U JP12199188U JPH0257935U JP H0257935 U JPH0257935 U JP H0257935U JP 12199188 U JP12199188 U JP 12199188U JP 12199188 U JP12199188 U JP 12199188U JP H0257935 U JPH0257935 U JP H0257935U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- vessel
- rotating shaft
- vertical axis
- liquid material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims description 7
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000011344 liquid material Substances 0.000 claims description 3
- 239000006185 dispersion Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 1
- 239000011796 hollow space material Substances 0.000 claims 1
Landscapes
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988121991U JPH0641605Y2 (ja) | 1988-09-16 | 1988-09-16 | 薄膜蒸発装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988121991U JPH0641605Y2 (ja) | 1988-09-16 | 1988-09-16 | 薄膜蒸発装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0257935U true JPH0257935U (fi) | 1990-04-26 |
| JPH0641605Y2 JPH0641605Y2 (ja) | 1994-11-02 |
Family
ID=31369509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988121991U Expired - Lifetime JPH0641605Y2 (ja) | 1988-09-16 | 1988-09-16 | 薄膜蒸発装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0641605Y2 (fi) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113694548A (zh) * | 2021-08-26 | 2021-11-26 | 上海精日新材料科技有限公司 | 一种节能型薄膜蒸发装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4928832A (fi) * | 1972-07-14 | 1974-03-14 | ||
| JPS566520A (en) * | 1979-06-28 | 1981-01-23 | Nec Corp | Oscillating device |
-
1988
- 1988-09-16 JP JP1988121991U patent/JPH0641605Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4928832A (fi) * | 1972-07-14 | 1974-03-14 | ||
| JPS566520A (en) * | 1979-06-28 | 1981-01-23 | Nec Corp | Oscillating device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113694548A (zh) * | 2021-08-26 | 2021-11-26 | 上海精日新材料科技有限公司 | 一种节能型薄膜蒸发装置 |
| CN113694548B (zh) * | 2021-08-26 | 2022-08-30 | 上海精日新材料科技有限公司 | 一种节能型薄膜蒸发装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0641605Y2 (ja) | 1994-11-02 |