JPH0256443U - - Google Patents

Info

Publication number
JPH0256443U
JPH0256443U JP13511388U JP13511388U JPH0256443U JP H0256443 U JPH0256443 U JP H0256443U JP 13511388 U JP13511388 U JP 13511388U JP 13511388 U JP13511388 U JP 13511388U JP H0256443 U JPH0256443 U JP H0256443U
Authority
JP
Japan
Prior art keywords
electrostatic chuck
ceramic layers
resistive film
base material
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13511388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13511388U priority Critical patent/JPH0256443U/ja
Publication of JPH0256443U publication Critical patent/JPH0256443U/ja
Pending legal-status Critical Current

Links

JP13511388U 1988-10-17 1988-10-17 Pending JPH0256443U (US06346242-20020212-C00066.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13511388U JPH0256443U (US06346242-20020212-C00066.png) 1988-10-17 1988-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13511388U JPH0256443U (US06346242-20020212-C00066.png) 1988-10-17 1988-10-17

Publications (1)

Publication Number Publication Date
JPH0256443U true JPH0256443U (US06346242-20020212-C00066.png) 1990-04-24

Family

ID=31394457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13511388U Pending JPH0256443U (US06346242-20020212-C00066.png) 1988-10-17 1988-10-17

Country Status (1)

Country Link
JP (1) JPH0256443U (US06346242-20020212-C00066.png)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04133443U (ja) * 1991-05-30 1992-12-11 京セラ株式会社 セラミツク製静電チヤツク
JPH058140A (ja) * 1990-12-28 1993-01-19 Ngk Insulators Ltd 静電チヤツク
JPH0513558A (ja) * 1990-12-25 1993-01-22 Ngk Insulators Ltd ウエハー加熱装置及びその製造方法
JP2009218242A (ja) * 2008-03-07 2009-09-24 Hitachi High-Technologies Corp プラズマ処理装置の製造方法
JP2020077651A (ja) * 2018-11-05 2020-05-21 日本特殊陶業株式会社 保持装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0513558A (ja) * 1990-12-25 1993-01-22 Ngk Insulators Ltd ウエハー加熱装置及びその製造方法
JPH058140A (ja) * 1990-12-28 1993-01-19 Ngk Insulators Ltd 静電チヤツク
JPH04133443U (ja) * 1991-05-30 1992-12-11 京セラ株式会社 セラミツク製静電チヤツク
JP2009218242A (ja) * 2008-03-07 2009-09-24 Hitachi High-Technologies Corp プラズマ処理装置の製造方法
JP2020077651A (ja) * 2018-11-05 2020-05-21 日本特殊陶業株式会社 保持装置

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