JPH0256443U - - Google Patents
Info
- Publication number
- JPH0256443U JPH0256443U JP13511388U JP13511388U JPH0256443U JP H0256443 U JPH0256443 U JP H0256443U JP 13511388 U JP13511388 U JP 13511388U JP 13511388 U JP13511388 U JP 13511388U JP H0256443 U JPH0256443 U JP H0256443U
- Authority
- JP
- Japan
- Prior art keywords
- electrostatic chuck
- ceramic layers
- resistive film
- base material
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims 4
- 238000010030 laminating Methods 0.000 claims 1
- 238000003475 lamination Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13511388U JPH0256443U (US06346242-20020212-C00066.png) | 1988-10-17 | 1988-10-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13511388U JPH0256443U (US06346242-20020212-C00066.png) | 1988-10-17 | 1988-10-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0256443U true JPH0256443U (US06346242-20020212-C00066.png) | 1990-04-24 |
Family
ID=31394457
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13511388U Pending JPH0256443U (US06346242-20020212-C00066.png) | 1988-10-17 | 1988-10-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0256443U (US06346242-20020212-C00066.png) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04133443U (ja) * | 1991-05-30 | 1992-12-11 | 京セラ株式会社 | セラミツク製静電チヤツク |
JPH058140A (ja) * | 1990-12-28 | 1993-01-19 | Ngk Insulators Ltd | 静電チヤツク |
JPH0513558A (ja) * | 1990-12-25 | 1993-01-22 | Ngk Insulators Ltd | ウエハー加熱装置及びその製造方法 |
JP2009218242A (ja) * | 2008-03-07 | 2009-09-24 | Hitachi High-Technologies Corp | プラズマ処理装置の製造方法 |
JP2020077651A (ja) * | 2018-11-05 | 2020-05-21 | 日本特殊陶業株式会社 | 保持装置 |
-
1988
- 1988-10-17 JP JP13511388U patent/JPH0256443U/ja active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0513558A (ja) * | 1990-12-25 | 1993-01-22 | Ngk Insulators Ltd | ウエハー加熱装置及びその製造方法 |
JPH058140A (ja) * | 1990-12-28 | 1993-01-19 | Ngk Insulators Ltd | 静電チヤツク |
JPH04133443U (ja) * | 1991-05-30 | 1992-12-11 | 京セラ株式会社 | セラミツク製静電チヤツク |
JP2009218242A (ja) * | 2008-03-07 | 2009-09-24 | Hitachi High-Technologies Corp | プラズマ処理装置の製造方法 |
JP2020077651A (ja) * | 2018-11-05 | 2020-05-21 | 日本特殊陶業株式会社 | 保持装置 |