JPH0256442U - - Google Patents
Info
- Publication number
- JPH0256442U JPH0256442U JP13562588U JP13562588U JPH0256442U JP H0256442 U JPH0256442 U JP H0256442U JP 13562588 U JP13562588 U JP 13562588U JP 13562588 U JP13562588 U JP 13562588U JP H0256442 U JPH0256442 U JP H0256442U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- substantially equivalent
- orientation flat
- vacuum
- spin chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13562588U JPH0256442U (de) | 1988-10-18 | 1988-10-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13562588U JPH0256442U (de) | 1988-10-18 | 1988-10-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0256442U true JPH0256442U (de) | 1990-04-24 |
Family
ID=31395420
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13562588U Pending JPH0256442U (de) | 1988-10-18 | 1988-10-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0256442U (de) |
-
1988
- 1988-10-18 JP JP13562588U patent/JPH0256442U/ja active Pending