JPH0256433U - - Google Patents

Info

Publication number
JPH0256433U
JPH0256433U JP13602888U JP13602888U JPH0256433U JP H0256433 U JPH0256433 U JP H0256433U JP 13602888 U JP13602888 U JP 13602888U JP 13602888 U JP13602888 U JP 13602888U JP H0256433 U JPH0256433 U JP H0256433U
Authority
JP
Japan
Prior art keywords
substrate
holding table
reaction chamber
vapor phase
phase growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13602888U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0543471Y2 (US20020128544A1-20020912-P00008.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988136028U priority Critical patent/JPH0543471Y2/ja
Publication of JPH0256433U publication Critical patent/JPH0256433U/ja
Application granted granted Critical
Publication of JPH0543471Y2 publication Critical patent/JPH0543471Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988136028U 1988-10-18 1988-10-18 Expired - Lifetime JPH0543471Y2 (US20020128544A1-20020912-P00008.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988136028U JPH0543471Y2 (US20020128544A1-20020912-P00008.png) 1988-10-18 1988-10-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988136028U JPH0543471Y2 (US20020128544A1-20020912-P00008.png) 1988-10-18 1988-10-18

Publications (2)

Publication Number Publication Date
JPH0256433U true JPH0256433U (US20020128544A1-20020912-P00008.png) 1990-04-24
JPH0543471Y2 JPH0543471Y2 (US20020128544A1-20020912-P00008.png) 1993-11-02

Family

ID=31396161

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988136028U Expired - Lifetime JPH0543471Y2 (US20020128544A1-20020912-P00008.png) 1988-10-18 1988-10-18

Country Status (1)

Country Link
JP (1) JPH0543471Y2 (US20020128544A1-20020912-P00008.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6066028U (ja) * 1983-10-11 1985-05-10 関西日本電気株式会社 炉芯管
JPS60119743U (ja) * 1984-01-23 1985-08-13 サンケン電気株式会社 化学的気相付着装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6066028U (ja) * 1983-10-11 1985-05-10 関西日本電気株式会社 炉芯管
JPS60119743U (ja) * 1984-01-23 1985-08-13 サンケン電気株式会社 化学的気相付着装置

Also Published As

Publication number Publication date
JPH0543471Y2 (US20020128544A1-20020912-P00008.png) 1993-11-02

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