JPH0254153U - - Google Patents
Info
- Publication number
- JPH0254153U JPH0254153U JP1988134239U JP13423988U JPH0254153U JP H0254153 U JPH0254153 U JP H0254153U JP 1988134239 U JP1988134239 U JP 1988134239U JP 13423988 U JP13423988 U JP 13423988U JP H0254153 U JPH0254153 U JP H0254153U
- Authority
- JP
- Japan
- Prior art keywords
- electrostatic deflection
- deflection plate
- insulator
- outer cylinder
- conductive member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012212 insulator Substances 0.000 claims description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988134239U JPH0614399Y2 (ja) | 1988-10-14 | 1988-10-14 | 静電偏向器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988134239U JPH0614399Y2 (ja) | 1988-10-14 | 1988-10-14 | 静電偏向器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0254153U true JPH0254153U (de) | 1990-04-19 |
| JPH0614399Y2 JPH0614399Y2 (ja) | 1994-04-13 |
Family
ID=31392814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988134239U Expired - Lifetime JPH0614399Y2 (ja) | 1988-10-14 | 1988-10-14 | 静電偏向器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0614399Y2 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2555219A1 (de) * | 2002-10-03 | 2013-02-06 | Canon Kabushiki Kaisha | Deflektor, Verfahren zur Herstellung des Deflektors und Belichtungsvorrichtung mit geladenem Teilchenstrahl |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02100250A (ja) * | 1988-10-06 | 1990-04-12 | Meiseki Biimu Technol Kk | 静電偏向器 |
-
1988
- 1988-10-14 JP JP1988134239U patent/JPH0614399Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02100250A (ja) * | 1988-10-06 | 1990-04-12 | Meiseki Biimu Technol Kk | 静電偏向器 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2555219A1 (de) * | 2002-10-03 | 2013-02-06 | Canon Kabushiki Kaisha | Deflektor, Verfahren zur Herstellung des Deflektors und Belichtungsvorrichtung mit geladenem Teilchenstrahl |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0614399Y2 (ja) | 1994-04-13 |