JPH0254153U - - Google Patents
Info
- Publication number
- JPH0254153U JPH0254153U JP1988134239U JP13423988U JPH0254153U JP H0254153 U JPH0254153 U JP H0254153U JP 1988134239 U JP1988134239 U JP 1988134239U JP 13423988 U JP13423988 U JP 13423988U JP H0254153 U JPH0254153 U JP H0254153U
- Authority
- JP
- Japan
- Prior art keywords
- electrostatic deflection
- deflection plate
- insulator
- outer cylinder
- conductive member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012212 insulator Substances 0.000 claims description 3
Description
第１図は本考案の一実施例を示す断面図、第２
図は第１図のＡ−Ａ断面図、第３図は従来の偏向
器を示す断面図である。
５……外筒、６……絶縁物、７……静電偏向板
、８……リング部材、９……導電性バー、１０…
…止めねじ。
Fig. 1 is a sectional view showing one embodiment of the present invention;
The figure is a sectional view taken along the line AA in FIG. 1, and FIG. 3 is a sectional view showing a conventional deflector. 5... Outer cylinder, 6... Insulator, 7... Electrostatic deflection plate, 8... Ring member, 9... Conductive bar, 10...
...Set screw.
Claims (1)
的に固定された２対の静電偏向板と、該静電偏向
板の中間部に、露出した絶縁物表面を覆う如く該
一体物と着脱可能に取り付けられた導電性部材と
を備え、該導電性部材は、該静電偏向板と電気的
に絶縁されて接地されていることを特徴とする静
電偏向板。 A cylindrical outer cylinder, two pairs of electrostatic deflection plates integrally fixed to the outer cylinder via an insulator, and an electrostatic deflection plate in the middle of the electrostatic deflection plates so as to cover the exposed surface of the insulator. An electrostatic deflection plate comprising an integrated body and a conductive member detachably attached, the conductive member being electrically insulated from the electrostatic deflection plate and grounded.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988134239U JPH0614399Y2 (en) | 1988-10-14 | 1988-10-14 | Electrostatic deflector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988134239U JPH0614399Y2 (en) | 1988-10-14 | 1988-10-14 | Electrostatic deflector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0254153U true JPH0254153U (en) | 1990-04-19 |
| JPH0614399Y2 JPH0614399Y2 (en) | 1994-04-13 |
Family
ID=31392814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988134239U Expired - Lifetime JPH0614399Y2 (en) | 1988-10-14 | 1988-10-14 | Electrostatic deflector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0614399Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2555219A1 (en) * | 2002-10-03 | 2013-02-06 | Canon Kabushiki Kaisha | Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02100250A (en) * | 1988-10-06 | 1990-04-12 | Meiseki Biimu Technol Kk | Electrostatic deflector |
-
1988
- 1988-10-14 JP JP1988134239U patent/JPH0614399Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02100250A (en) * | 1988-10-06 | 1990-04-12 | Meiseki Biimu Technol Kk | Electrostatic deflector |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2555219A1 (en) * | 2002-10-03 | 2013-02-06 | Canon Kabushiki Kaisha | Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0614399Y2 (en) | 1994-04-13 |