JPH0253965U - - Google Patents
Info
- Publication number
- JPH0253965U JPH0253965U JP13111888U JP13111888U JPH0253965U JP H0253965 U JPH0253965 U JP H0253965U JP 13111888 U JP13111888 U JP 13111888U JP 13111888 U JP13111888 U JP 13111888U JP H0253965 U JPH0253965 U JP H0253965U
- Authority
- JP
- Japan
- Prior art keywords
- guide
- frame
- holder
- revolving base
- substrate holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims description 3
- 238000007738 vacuum evaporation Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 3
- 238000001704 evaporation Methods 0.000 claims 1
- 230000008020 evaporation Effects 0.000 claims 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13111888U JPH0253965U (cs) | 1988-10-06 | 1988-10-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13111888U JPH0253965U (cs) | 1988-10-06 | 1988-10-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0253965U true JPH0253965U (cs) | 1990-04-18 |
Family
ID=31386885
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13111888U Pending JPH0253965U (cs) | 1988-10-06 | 1988-10-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0253965U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0444358U (cs) * | 1990-08-08 | 1992-04-15 |
-
1988
- 1988-10-06 JP JP13111888U patent/JPH0253965U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0444358U (cs) * | 1990-08-08 | 1992-04-15 |
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