JPH0252439U - - Google Patents
Info
- Publication number
- JPH0252439U JPH0252439U JP13059388U JP13059388U JPH0252439U JP H0252439 U JPH0252439 U JP H0252439U JP 13059388 U JP13059388 U JP 13059388U JP 13059388 U JP13059388 U JP 13059388U JP H0252439 U JPH0252439 U JP H0252439U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace
- heat treatment
- treatment furnace
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 9
- 238000009792 diffusion process Methods 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13059388U JPH0252439U (fr) | 1988-10-05 | 1988-10-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13059388U JPH0252439U (fr) | 1988-10-05 | 1988-10-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0252439U true JPH0252439U (fr) | 1990-04-16 |
Family
ID=31385903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13059388U Pending JPH0252439U (fr) | 1988-10-05 | 1988-10-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0252439U (fr) |
-
1988
- 1988-10-05 JP JP13059388U patent/JPH0252439U/ja active Pending