JPH0252435U - - Google Patents
Info
- Publication number
- JPH0252435U JPH0252435U JP13273088U JP13273088U JPH0252435U JP H0252435 U JPH0252435 U JP H0252435U JP 13273088 U JP13273088 U JP 13273088U JP 13273088 U JP13273088 U JP 13273088U JP H0252435 U JPH0252435 U JP H0252435U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- quartz
- double
- double quartz
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13273088U JPH0252435U (fr) | 1988-10-11 | 1988-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13273088U JPH0252435U (fr) | 1988-10-11 | 1988-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0252435U true JPH0252435U (fr) | 1990-04-16 |
Family
ID=31389962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13273088U Pending JPH0252435U (fr) | 1988-10-11 | 1988-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0252435U (fr) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5735336A (en) * | 1980-08-12 | 1982-02-25 | Toshiba Ceramics Co Ltd | Reaction tube for heat treatment |
| JPS6376319A (ja) * | 1986-09-18 | 1988-04-06 | Fujitsu Ltd | 気相成長装置 |
| JPS63102224A (ja) * | 1986-10-20 | 1988-05-07 | Fuji Photo Film Co Ltd | 半導体素子の製造炉 |
-
1988
- 1988-10-11 JP JP13273088U patent/JPH0252435U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5735336A (en) * | 1980-08-12 | 1982-02-25 | Toshiba Ceramics Co Ltd | Reaction tube for heat treatment |
| JPS6376319A (ja) * | 1986-09-18 | 1988-04-06 | Fujitsu Ltd | 気相成長装置 |
| JPS63102224A (ja) * | 1986-10-20 | 1988-05-07 | Fuji Photo Film Co Ltd | 半導体素子の製造炉 |