JPH0252432U - - Google Patents
Info
- Publication number
- JPH0252432U JPH0252432U JP13265888U JP13265888U JPH0252432U JP H0252432 U JPH0252432 U JP H0252432U JP 13265888 U JP13265888 U JP 13265888U JP 13265888 U JP13265888 U JP 13265888U JP H0252432 U JPH0252432 U JP H0252432U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- output
- temperature
- longitudinal direction
- infrared lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 3
- 238000001947 vapour-phase growth Methods 0.000 claims 2
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13265888U JPH0252432U (OSRAM) | 1988-10-11 | 1988-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13265888U JPH0252432U (OSRAM) | 1988-10-11 | 1988-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0252432U true JPH0252432U (OSRAM) | 1990-04-16 |
Family
ID=31389827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13265888U Pending JPH0252432U (OSRAM) | 1988-10-11 | 1988-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0252432U (OSRAM) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6355427B2 (OSRAM) * | 1981-02-23 | 1988-11-02 | Brother Ind Ltd |
-
1988
- 1988-10-11 JP JP13265888U patent/JPH0252432U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6355427B2 (OSRAM) * | 1981-02-23 | 1988-11-02 | Brother Ind Ltd |
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