JPH0252431U - - Google Patents
Info
- Publication number
- JPH0252431U JPH0252431U JP13242088U JP13242088U JPH0252431U JP H0252431 U JPH0252431 U JP H0252431U JP 13242088 U JP13242088 U JP 13242088U JP 13242088 U JP13242088 U JP 13242088U JP H0252431 U JPH0252431 U JP H0252431U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- temperature
- vacuum container
- outside
- temperature signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 230000005855 radiation Effects 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13242088U JPH0252431U (enExample) | 1988-10-11 | 1988-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13242088U JPH0252431U (enExample) | 1988-10-11 | 1988-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0252431U true JPH0252431U (enExample) | 1990-04-16 |
Family
ID=31389364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13242088U Pending JPH0252431U (enExample) | 1988-10-11 | 1988-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0252431U (enExample) |
-
1988
- 1988-10-11 JP JP13242088U patent/JPH0252431U/ja active Pending