JPH0251057U - - Google Patents
Info
- Publication number
- JPH0251057U JPH0251057U JP12973688U JP12973688U JPH0251057U JP H0251057 U JPH0251057 U JP H0251057U JP 12973688 U JP12973688 U JP 12973688U JP 12973688 U JP12973688 U JP 12973688U JP H0251057 U JPH0251057 U JP H0251057U
- Authority
- JP
- Japan
- Prior art keywords
- polished
- holder
- corner
- fitted
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims 4
- 239000004744 fabric Substances 0.000 claims 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12973688U JPH0251057U (enrdf_load_stackoverflow) | 1988-10-03 | 1988-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12973688U JPH0251057U (enrdf_load_stackoverflow) | 1988-10-03 | 1988-10-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0251057U true JPH0251057U (enrdf_load_stackoverflow) | 1990-04-10 |
Family
ID=31384289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12973688U Pending JPH0251057U (enrdf_load_stackoverflow) | 1988-10-03 | 1988-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0251057U (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006297524A (ja) * | 2005-04-19 | 2006-11-02 | Shin Etsu Chem Co Ltd | 角型基板研磨用ガイドリング及び研磨ヘッド並びに角型基板の研磨方法 |
| JP2006297523A (ja) * | 2005-04-19 | 2006-11-02 | Shin Etsu Chem Co Ltd | 角型基板研磨用ガイドリング及び研磨ヘッド並びに角型基板の研磨方法 |
| WO2019058871A1 (ja) * | 2017-09-22 | 2019-03-28 | 信越半導体株式会社 | 研磨ヘッド及び研磨ヘッドの製造方法 |
| CN111644977A (zh) * | 2020-07-17 | 2020-09-11 | 中国科学院微电子研究所 | 研磨用固定环以及研磨头 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62287967A (ja) * | 1986-06-03 | 1987-12-14 | Kawashima Hiroyuki | ラツピングキヤリア |
-
1988
- 1988-10-03 JP JP12973688U patent/JPH0251057U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62287967A (ja) * | 1986-06-03 | 1987-12-14 | Kawashima Hiroyuki | ラツピングキヤリア |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006297524A (ja) * | 2005-04-19 | 2006-11-02 | Shin Etsu Chem Co Ltd | 角型基板研磨用ガイドリング及び研磨ヘッド並びに角型基板の研磨方法 |
| JP2006297523A (ja) * | 2005-04-19 | 2006-11-02 | Shin Etsu Chem Co Ltd | 角型基板研磨用ガイドリング及び研磨ヘッド並びに角型基板の研磨方法 |
| WO2019058871A1 (ja) * | 2017-09-22 | 2019-03-28 | 信越半導体株式会社 | 研磨ヘッド及び研磨ヘッドの製造方法 |
| CN111644977A (zh) * | 2020-07-17 | 2020-09-11 | 中国科学院微电子研究所 | 研磨用固定环以及研磨头 |