JPH0250954U - - Google Patents
Info
- Publication number
- JPH0250954U JPH0250954U JP12888588U JP12888588U JPH0250954U JP H0250954 U JPH0250954 U JP H0250954U JP 12888588 U JP12888588 U JP 12888588U JP 12888588 U JP12888588 U JP 12888588U JP H0250954 U JPH0250954 U JP H0250954U
- Authority
- JP
- Japan
- Prior art keywords
- plane
- wafer
- pressing force
- holder
- positioning member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005468 ion implantation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988128885U JPH0728693Y2 (ja) | 1988-09-30 | 1988-09-30 | ウェハ保持具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988128885U JPH0728693Y2 (ja) | 1988-09-30 | 1988-09-30 | ウェハ保持具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0250954U true JPH0250954U (sv) | 1990-04-10 |
| JPH0728693Y2 JPH0728693Y2 (ja) | 1995-06-28 |
Family
ID=31382641
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988128885U Expired - Lifetime JPH0728693Y2 (ja) | 1988-09-30 | 1988-09-30 | ウェハ保持具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0728693Y2 (sv) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006073963A (ja) * | 2004-09-06 | 2006-03-16 | Tokyo Electron Ltd | ウエハチャック |
| JP2015079859A (ja) * | 2013-10-17 | 2015-04-23 | 株式会社ディスコ | 被加工物保持機構 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62103257U (sv) * | 1985-12-19 | 1987-07-01 |
-
1988
- 1988-09-30 JP JP1988128885U patent/JPH0728693Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62103257U (sv) * | 1985-12-19 | 1987-07-01 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006073963A (ja) * | 2004-09-06 | 2006-03-16 | Tokyo Electron Ltd | ウエハチャック |
| JP4559801B2 (ja) * | 2004-09-06 | 2010-10-13 | 東京エレクトロン株式会社 | ウエハチャック |
| JP2015079859A (ja) * | 2013-10-17 | 2015-04-23 | 株式会社ディスコ | 被加工物保持機構 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0728693Y2 (ja) | 1995-06-28 |