JPH0250809U - - Google Patents
Info
- Publication number
- JPH0250809U JPH0250809U JP12777488U JP12777488U JPH0250809U JP H0250809 U JPH0250809 U JP H0250809U JP 12777488 U JP12777488 U JP 12777488U JP 12777488 U JP12777488 U JP 12777488U JP H0250809 U JPH0250809 U JP H0250809U
- Authority
- JP
- Japan
- Prior art keywords
- coil
- thin film
- wound
- frame
- terminal end
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims description 8
- 238000005530 etching Methods 0.000 claims 1
- 239000012212 insulator Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
- 239000010408 film Substances 0.000 description 9
- 239000004020 conductor Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Description
第１図は本考案の一実施例を示す平面図、第２
図ａ〜ｈは本考案の薄膜コイルの製造方法を説明
するための断面図、第３図は本考案の薄膜コイル
を薄膜磁気ヘツドに応用した例の平面図、第４図
は第３図の−矢視断面図、第５図ａ〜ｌは第
３図の薄膜磁気ヘツドの製造方法を説明するため
の断面図、第６図は従来の薄膜コイルの平面図で
ある。
１０……第１コイル、１０ａ……最内終端部、
１０ｂ……最外終端部、１１……絶縁膜、１１ａ
……ギヤツプ、１２……第２コイル、１２ａ……
最内終端部、１２ｂ……最外終端部、１３……フ
レーム、１４……接続線、１６……第１コイルボ
ンデイングパツト、１８……第２コイルボンデイ
ングパツト、１９……絶縁膜、２０……引き出し
線、２２……磁束通過口、２４……絶縁基板、２
６……第１導体膜、２８……絶縁膜、３０……第
２導体膜、３２……絶縁膜、３４……導体膜、３
６……上部磁極片、３７……磁性膜、３８……溝
、４０……磁性膜。
Figure 1 is a plan view showing one embodiment of the present invention;
Figures a to h are cross-sectional views for explaining the manufacturing method of the thin film coil of the present invention, Figure 3 is a plan view of an example in which the thin film coil of the present invention is applied to a thin film magnetic head, and Figure 4 is the same as that of Figure 3. 5A to 5L are sectional views for explaining the manufacturing method of the thin film magnetic head of FIG. 3, and FIG. 6 is a plan view of a conventional thin film coil. 10...first coil, 10a...innermost terminal part,
10b... Outermost terminal portion, 11... Insulating film, 11a
...Gap, 12...Second coil, 12a...
Innermost terminal end, 12b... Outermost end, 13... Frame, 14... Connection wire, 16... First coil bonding pad, 18... Second coil bonding pad, 19... Insulating film, 20... ...Leader wire, 22...Magnetic flux passage port, 24...Insulating board, 2
6...First conductor film, 28...Insulating film, 30...Second conductor film, 32...Insulating film, 34...Conductor film, 3
6...Top pole piece, 37...Magnetic film, 38...Groove, 40...Magnetic film.
補正 平１．２．３
図面の簡単な説明を次のように補正する。
明細書中、第１５頁第７行の「ｌ」を「」と
補正する。Amendment 1.2.3 The brief description of the drawing is amended as follows. In the specification, "l" on page 15, line 7 is corrected to "".
Claims (1)
に巻回し、この第１コイルの間に形成されたスパ
イラル状の隙間に絶縁物を介して第２コイルを巻
回し、前記第１コイルの最外終端部と前記第２コ
イルの最内終端部とを接続手段によつて電気的に
接続した薄膜コイルにおいて、第１コイルを巻回
する際に第１コイルの外側の任意の距離隔つた部
分に、第２コイルの最外周部を規制するためのフ
レームを第１コイルと同一物質で設けたことを特
徴とする多層配線薄膜コイル。 (2) 第１コイル及び第２コイルを形成した後に
、切断またはエツチング等の手段により第１コイ
ルとフレームとを分離し、電気的に絶縁するよう
にしたことを特徴とする請求項１記載の多層配線
薄膜コイル。[Claims for Utility Model Registration] (1) A first coil is spirally wound at an arbitrary pitch, and a second coil is wound through an insulator in the spiral gap formed between the first coils. In the thin film coil, the outermost terminal end of the first coil and the innermost terminal end of the second coil are electrically connected by a connecting means, when the first coil is wound. 1. A multilayer wiring thin film coil, characterized in that a frame for regulating the outermost periphery of the second coil is provided on the outside at an arbitrary distance apart, and is made of the same material as the first coil. (2) After forming the first coil and the second coil, the first coil and the frame are separated by means such as cutting or etching to electrically insulate them. Multilayer wiring thin film coil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12777488U JPH0749609Y2 (en) | 1988-09-29 | 1988-09-29 | Multilayer wiring thin film coil |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12777488U JPH0749609Y2 (en) | 1988-09-29 | 1988-09-29 | Multilayer wiring thin film coil |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0250809U true JPH0250809U (en) | 1990-04-10 |
| JPH0749609Y2 JPH0749609Y2 (en) | 1995-11-13 |
Family
ID=31380504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12777488U Expired - Lifetime JPH0749609Y2 (en) | 1988-09-29 | 1988-09-29 | Multilayer wiring thin film coil |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0749609Y2 (en) |
-
1988
- 1988-09-29 JP JP12777488U patent/JPH0749609Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0749609Y2 (en) | 1995-11-13 |
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