JPH0250080U - - Google Patents
Info
- Publication number
- JPH0250080U JPH0250080U JP12515688U JP12515688U JPH0250080U JP H0250080 U JPH0250080 U JP H0250080U JP 12515688 U JP12515688 U JP 12515688U JP 12515688 U JP12515688 U JP 12515688U JP H0250080 U JPH0250080 U JP H0250080U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- shape
- vibration
- central portion
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007423 decrease Effects 0.000 claims 1
- 239000012530 fluid Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Description
第１図乃至第３図は本考案の一実施例を示すも
ので、第１図は縦断面図、第２図は作用を説明す
るための要部の断面図、第３図は作用説明図、第
４図は従来構成を示す第１図相当図である。
図面中、１１は基体、１９は振動板、２０は弾
性板、２１は圧電素子、２４は駆動体、２７はポ
ンプ空間である。
Figures 1 to 3 show one embodiment of the present invention, with Figure 1 being a longitudinal sectional view, Figure 2 being a sectional view of the main parts to explain the action, and Figure 3 being an explanatory diagram of the action. , FIG. 4 is a diagram corresponding to FIG. 1 showing a conventional configuration. In the drawing, 11 is a base, 19 is a diaphragm, 20 is an elastic plate, 21 is a piezoelectric element, 24 is a driving body, and 27 is a pump space.
Claims (1)
と、この基体に外周部が支持された円形の弾性板
に圧電素子を取付けてなる振動板と、前記基体の
閉塞側において前記振動板の中心部に連結されそ
の振動板の振動に応じて外周部が基体の内周部に
対して密着状態で摺動変位するとともに振動板と
対向する面が振動板の最大撓み形状と同等或いは
それよりも小なる曲率で中央部が振動板に向つて
膨らんだ形状に設定された駆動体とを具備してな
り、前記振動板の振動により基体と駆動体によつ
て囲まれたポンプ空間の容積が増減することに基
づいて流体の圧送を行うことを特徴とする圧電駆
動形ポンプ装置。 a diaphragm having a piezoelectric element attached to a circular elastic plate whose outer periphery is supported by the diaphragm; and a central portion of the diaphragm on the closed side of the diaphragm. is connected to the diaphragm, and in response to the vibration of the diaphragm, the outer periphery slides in close contact with the inner periphery of the base, and the surface facing the diaphragm has a shape that is equal to or smaller than the maximum deflection shape of the diaphragm. and a driving body whose central portion is set to have a shape with a curvature that bulges toward the diaphragm, and the volume of the pump space surrounded by the base and the driving body increases or decreases due to the vibration of the diaphragm. A piezoelectrically driven pump device that pumps fluid based on
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12515688U JPH0250080U (en) | 1988-09-27 | 1988-09-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12515688U JPH0250080U (en) | 1988-09-27 | 1988-09-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0250080U true JPH0250080U (en) | 1990-04-06 |
Family
ID=31375512
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12515688U Pending JPH0250080U (en) | 1988-09-27 | 1988-09-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0250080U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100582886B1 (en) * | 2004-09-14 | 2006-05-25 | 삼성전자주식회사 | Micro membrane pump |
-
1988
- 1988-09-27 JP JP12515688U patent/JPH0250080U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100582886B1 (en) * | 2004-09-14 | 2006-05-25 | 삼성전자주식회사 | Micro membrane pump |
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