JPH0249136U - - Google Patents

Info

Publication number
JPH0249136U
JPH0249136U JP12633888U JP12633888U JPH0249136U JP H0249136 U JPH0249136 U JP H0249136U JP 12633888 U JP12633888 U JP 12633888U JP 12633888 U JP12633888 U JP 12633888U JP H0249136 U JPH0249136 U JP H0249136U
Authority
JP
Japan
Prior art keywords
edge
lifting platform
supported
substrate storage
processed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12633888U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0727625Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988126338U priority Critical patent/JPH0727625Y2/ja
Publication of JPH0249136U publication Critical patent/JPH0249136U/ja
Application granted granted Critical
Publication of JPH0727625Y2 publication Critical patent/JPH0727625Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988126338U 1988-09-29 1988-09-29 基板収納カセット昇降機の振動防止装置 Expired - Lifetime JPH0727625Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988126338U JPH0727625Y2 (ja) 1988-09-29 1988-09-29 基板収納カセット昇降機の振動防止装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988126338U JPH0727625Y2 (ja) 1988-09-29 1988-09-29 基板収納カセット昇降機の振動防止装置

Publications (2)

Publication Number Publication Date
JPH0249136U true JPH0249136U (de) 1990-04-05
JPH0727625Y2 JPH0727625Y2 (ja) 1995-06-21

Family

ID=31377774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988126338U Expired - Lifetime JPH0727625Y2 (ja) 1988-09-29 1988-09-29 基板収納カセット昇降機の振動防止装置

Country Status (1)

Country Link
JP (1) JPH0727625Y2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102372144A (zh) * 2010-07-01 2012-03-14 村田自动化机械有限公司 基板用盒的载放台

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5720444A (en) * 1980-07-11 1982-02-02 Citizen Watch Co Ltd Feeding device for semiconductor wafer
JPS6353330A (ja) * 1986-08-20 1988-03-07 Nippon Kokan Kk <Nkk> 上下振子式動吸振器

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5720444A (en) * 1980-07-11 1982-02-02 Citizen Watch Co Ltd Feeding device for semiconductor wafer
JPS6353330A (ja) * 1986-08-20 1988-03-07 Nippon Kokan Kk <Nkk> 上下振子式動吸振器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102372144A (zh) * 2010-07-01 2012-03-14 村田自动化机械有限公司 基板用盒的载放台

Also Published As

Publication number Publication date
JPH0727625Y2 (ja) 1995-06-21

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