JPH0246866U - - Google Patents
Info
- Publication number
- JPH0246866U JPH0246866U JP12587788U JP12587788U JPH0246866U JP H0246866 U JPH0246866 U JP H0246866U JP 12587788 U JP12587788 U JP 12587788U JP 12587788 U JP12587788 U JP 12587788U JP H0246866 U JPH0246866 U JP H0246866U
- Authority
- JP
- Japan
- Prior art keywords
- quartz ampoule
- growth
- substrate
- liquid phase
- phase epitaxial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003708 ampul Substances 0.000 claims description 8
- 239000010453 quartz Substances 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 8
- 239000007791 liquid phase Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12587788U JPH0246866U (de) | 1988-09-26 | 1988-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12587788U JPH0246866U (de) | 1988-09-26 | 1988-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0246866U true JPH0246866U (de) | 1990-03-30 |
Family
ID=31376872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12587788U Pending JPH0246866U (de) | 1988-09-26 | 1988-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0246866U (de) |
-
1988
- 1988-09-26 JP JP12587788U patent/JPH0246866U/ja active Pending
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