JPH0246857U - - Google Patents
Info
- Publication number
- JPH0246857U JPH0246857U JP12423888U JP12423888U JPH0246857U JP H0246857 U JPH0246857 U JP H0246857U JP 12423888 U JP12423888 U JP 12423888U JP 12423888 U JP12423888 U JP 12423888U JP H0246857 U JPH0246857 U JP H0246857U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- sample
- plasma generation
- gas supply
- supply pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005284 excitation Effects 0.000 claims description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12423888U JPH0246857U (da) | 1988-09-22 | 1988-09-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12423888U JPH0246857U (da) | 1988-09-22 | 1988-09-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0246857U true JPH0246857U (da) | 1990-03-30 |
Family
ID=31373797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12423888U Pending JPH0246857U (da) | 1988-09-22 | 1988-09-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0246857U (da) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0585380U (ja) * | 1992-04-20 | 1993-11-19 | 株式会社鈴木製作所 | ミシンの針留め |
-
1988
- 1988-09-22 JP JP12423888U patent/JPH0246857U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0585380U (ja) * | 1992-04-20 | 1993-11-19 | 株式会社鈴木製作所 | ミシンの針留め |