JPH0246638A - Fluorescent character display tube - Google Patents
Fluorescent character display tubeInfo
- Publication number
- JPH0246638A JPH0246638A JP19863888A JP19863888A JPH0246638A JP H0246638 A JPH0246638 A JP H0246638A JP 19863888 A JP19863888 A JP 19863888A JP 19863888 A JP19863888 A JP 19863888A JP H0246638 A JPH0246638 A JP H0246638A
- Authority
- JP
- Japan
- Prior art keywords
- phosphor
- layer
- display tube
- conductive film
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims abstract description 31
- 239000000758 substrate Substances 0.000 claims abstract description 19
- 229910052751 metal Inorganic materials 0.000 claims description 24
- 239000002184 metal Substances 0.000 claims description 24
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 8
- 239000005357 flat glass Substances 0.000 description 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は蛍光表示管に係シ、特に表示を電極形成基板の
反対の面から観察する平面発光型蛍光表示管の電極構造
に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a fluorescent display tube, and more particularly to an electrode structure of a flat-emitting fluorescent display tube in which a display is observed from the opposite side of an electrode-forming substrate.
従来、この種の平面発光型蛍光表示管の一例は、第2図
に示すように、透光性絶縁基板1(通常板ガラス用用い
られる)に、アルミニニーム等の金属導電膜を全面に形
成し、しかる後所望パターンが得られるようにフォトリ
ソグラフィー等の技術を用いて、金属電極2a、2bを
形成する。Conventionally, an example of this type of flat-emitting type fluorescent display tube, as shown in FIG. Thereafter, metal electrodes 2a and 2b are formed using a technique such as photolithography so as to obtain a desired pattern.
この場合、表示部の金属電極2blCついては、発光表
示が観察面(下面)側圧効率よく取プ出されるために通
常ハニカム構造やストライプ構造に形成する。In this case, the metal electrodes 2blC of the display section are usually formed in a honeycomb structure or stripe structure so that the light emitting display can be efficiently extracted from the observation surface (lower surface) side pressure.
しかる後、表示をよシ明瞭にさせるため、絶縁層3を前
記金属電極2aに、印刷等の技術を用いて形成する。Thereafter, in order to make the display clearer, an insulating layer 3 is formed on the metal electrode 2a using a technique such as printing.
次に、蛍光体4を同様の手法を用いて、表示部の金属電
極2bの上に形成する。Next, the phosphor 4 is formed on the metal electrode 2b of the display section using a similar method.
グリッド5、フィラメント6を、第2図のように構成さ
せ、最後忙全体を真空気密封止して、蛍光表示管が完成
する。The grid 5 and the filament 6 are constructed as shown in FIG. 2, and the entire structure is vacuum-sealed to complete the fluorescent display tube.
このようKして作製された蛍光表示管では、フィラメン
ト6を600℃乃至650℃位に加熱するととによシエ
ミッシ曹ンを取り出し、これをグリッド5で加速させ、
蛍光体4に衝突させることKより、発光表示を得ていた
。In the fluorescent display tube manufactured by heating in this manner, when the filament 6 is heated to about 600°C to 650°C, the carbon dioxide is taken out, which is accelerated by the grid 5.
By colliding with the phosphor 4, a luminescent display was obtained.
前述した従来の蛍光表示管は、蛍光体4が透光性絶縁基
板1と接した構造となっているため、次の欠点がある。Since the conventional fluorescent display tube described above has a structure in which the phosphor 4 is in contact with the light-transmitting insulating substrate 1, it has the following drawbacks.
即ち、透光性絶縁基板1は、通常コスト面から低価格な
板ガラスが使用されておシ、これに含まれるナトリウム
やカリウム等のアルカリ成分が直接接している蛍光体4
と相互作用し、蛍光体4が劣化する欠点がある。That is, the light-transmitting insulating substrate 1 is usually made of a low-priced plate glass from a cost perspective, and the phosphor 4 that is in direct contact with alkaline components such as sodium and potassium contained in the plate glass is used as the light-transmitting insulating substrate 1.
There is a drawback that the phosphor 4 deteriorates due to interaction with the phosphor.
また、蛍光表示管の製造工程に於いて、特に500℃乃
至600℃の高温時に1金属電極2aと絶縁層3とが相
互作用するため、電気的導通の確保のためには金属電極
2aの厚さは、1 /Jm以上必要である。このため、
表示を透光性絶縁基板lの電極形成の反対側から観察す
る平面発光型蛍光表示管に於いては、金属電極2aの反
射によ、りて、表示品位が劣る欠点もある。In addition, in the manufacturing process of a fluorescent display tube, the metal electrode 2a and the insulating layer 3 interact with each other especially at high temperatures of 500°C to 600°C, so the thickness of the metal electrode 2a must be The required value is 1/Jm or more. For this reason,
In a flat-emitting type fluorescent display tube in which the display is observed from the opposite side of the transparent insulating substrate 1 from which the electrodes are formed, there is a drawback that the display quality is poor due to reflection from the metal electrode 2a.
なお、前述の欠点の排除するため、第3図の従来の他側
に示すように、透光性酸化物導電電極7を使用した蛍光
表示管も使用されているが、この蛍光表示管4次の欠点
がある。即ちこの蛍光表示管では、互いに半導体である
透光性酸化物導電電極7と蛍光体4とが接した構造とな
っており、前述の第2図の構造忙比べて、蛍光体4の実
効の陽極電圧が低下し、輝度が低くなるという欠点があ
る。この傾向は、特KZnOiZn系の蛍光体に顕著で
あシ、第2図の構造に比べ、第3図の構造では輝度が3
0%乃至50%低くなる。In order to eliminate the above-mentioned drawbacks, a fluorescent display tube using a translucent oxide conductive electrode 7 is also used, as shown on the other side of the conventional one in FIG. There are drawbacks. That is, in this fluorescent display tube, the transparent oxide conductive electrode 7, which is a semiconductor, and the phosphor 4 are in contact with each other, and compared to the structure shown in FIG. The drawback is that the anode voltage is lowered and the brightness is lowered. This tendency is particularly noticeable in KZnOiZn-based phosphors, and compared to the structure in Fig. 2, the structure in Fig. 3 has a luminance of 3
0% to 50% lower.
本発明の目的は、前記欠点が解決され、表示品位が低下
せず、輝度も低下しないようKした蛍光表示管を提供す
ることKある。SUMMARY OF THE INVENTION An object of the present invention is to provide a fluorescent display tube in which the above-mentioned drawbacks are solved and the display quality is not degraded and the brightness is not degraded.
本発明の構成は、気密容器を構成する透光性基板上の電
極上に蛍光体を塗布して表示パターンを形成し、フィラ
メントから放出される電子を前記蛍光体く衝撃させて発
光させ、前記透光性基板の電極の形成面の反対の面より
表示を観察する蛍光表示管に於いて、前記電極のうち第
1層目を透光性酸化物導電膜、この上の第2層目を金属
導電膜で形成し、前金属導電膜上に前記蛍光体が形成さ
れていることを特徴とする。The structure of the present invention is to form a display pattern by coating a phosphor on an electrode on a translucent substrate constituting an airtight container, and to make the phosphor emit light by bombarding the phosphor with electrons emitted from a filament. In a fluorescent display tube in which the display is observed from the surface opposite to the surface on which the electrodes are formed on a transparent substrate, the first layer of the electrode is a transparent oxide conductive film, and the second layer above this is a transparent conductive oxide film. It is characterized in that it is formed of a metal conductive film, and the phosphor is formed on the metal conductive film.
次に本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.
第1図は本発明の第1の実施例の蛍光表示管の基板、グ
リッド及びフィラメントの部分を示す断面図である。同
図において、本実施例の蛍光表示管は、透光性絶縁基板
1が板ガラスからなシ、この主面上に透光性酸化物導電
膜であるITO膜を200OA、さらに金属導電膜であ
るA1膜を500A蒸着法を用いて形成した。FIG. 1 is a sectional view showing the substrate, grid, and filament portions of a fluorescent display tube according to a first embodiment of the present invention. In the figure, the fluorescent display tube of this embodiment has a light-transmitting insulating substrate 1 made of plate glass, a light-transmitting oxide conductive film of ITO film of 200 OA on its main surface, and a metal conductive film. The A1 film was formed using a 500A vapor deposition method.
次に、所望のパターンや表示を得るため、フォトレジス
ト塗布、露光及びエツチングの工程からなるフォトリン
グラフィ技術ζ(よって、透光性酸化物電極7及び金属
電極2を形成した。Next, in order to obtain a desired pattern or display, a photolithography technique ζ consisting of steps of photoresist application, exposure and etching was used (thereby, a transparent oxide electrode 7 and a metal electrode 2 were formed).
次に、絶縁層3を表示部以外の部分に印刷法と約500
℃の熱工程によって形成し、蛍光体4も同様の方法によ
り、形成させた。グリッド6、フィラメント7を順次、
蛍光面から所定の距離を保つように形成し、蝦後に全体
を真空気密封止させ、蛍光表示管を作製した。Next, the insulating layer 3 is applied to the area other than the display area using a printing method.
It was formed by a thermal process at .degree. C., and the phosphor 4 was also formed by the same method. Grid 6, filament 7 sequentially,
It was formed to maintain a predetermined distance from the phosphor screen, and the whole was sealed in vacuum to produce a phosphor display tube.
次に本発明の第2の実施例の蛍光表示管を説明する。Next, a fluorescent display tube according to a second embodiment of the present invention will be described.
第2の実施例は、前記第1の実施例と同様であるが、異
なる点は、透光性酸化物導電膜として厚さ4000Aの
5n02膜を用いている点であシ、前記第1の実施例と
同様にして、蛍光表示管を作製した。The second example is similar to the first example, except that a 5n02 film with a thickness of 4000A is used as the transparent oxide conductive film, and the second example is similar to the first example. A fluorescent display tube was produced in the same manner as in the example.
次に本発明の第3の実施例の蛍光表示管を説明する。第
3の実施例が、前記第1の実施例と異なる点は、透光性
酸化物導電膜として厚さ8000AのITO膜、金属導
電膜として厚さ800AのAu膜を使用している点でち
り、前述と同様に蛍光表示管を作製した。Next, a fluorescent display tube according to a third embodiment of the present invention will be described. The third embodiment differs from the first embodiment in that an 8000A thick ITO film is used as the transparent oxide conductive film, and an 800A thick Au film is used as the metal conductive film. A fluorescent display tube was fabricated in the same manner as described above.
これらf41.第2.第3の実施例で作製した蛍光表示
管の輝度特性を調査したところ、従来の蛍光表示管に比
べ、ZnO:Zn系の蛍光体では10〜20%、(Zn
、°Cd)SiAg系の蛍光体では20〜30%の輝度
向上がいずれも確かめられた。These f41. Second. When we investigated the brightness characteristics of the fluorescent display tube manufactured in the third example, we found that compared to conventional fluorescent display tubes, the brightness of the ZnO:Zn-based phosphor was 10 to 20%
, °Cd) A 20-30% increase in brightness was confirmed for all SiAg-based phosphors.
以上これら実施例の蛍光表示管は、透光性基板1上の電
極が、第1層月を100OA乃至10000乃至100
0Aの金属導電膜で形成し、しかる後蛍光体が形成され
た構造を有しているから、蛍光体への透光性基板からの
アルカリ成分の拡散を防止でき、また蛍光体と金属導電
膜とが接しているので実効の陽極電位の低下が少なく、
このため従来の蛍光表示管に比べ、輝度特性の向上が図
れる。In the fluorescent display tubes of these embodiments, the electrode on the transparent substrate 1 has a first layer of 100OA to 10,000 to 100
Since it has a structure in which it is formed with a 0A metal conductive film and then a phosphor is formed, it is possible to prevent the alkali component from diffusing from the light-transmitting substrate to the phosphor, and it is also possible to prevent the diffusion of alkaline components from the light-transmitting substrate into the phosphor. Since they are in contact with each other, there is little drop in the effective anode potential.
Therefore, compared to conventional fluorescent display tubes, brightness characteristics can be improved.
また、本実施例の蛍光表示管では、前述のように透光性
酸化物導を膜と金属導電膜との2層構造を有しているの
で、製造工程中の熱処理工程において、金属導電膜と絶
縁膜とが相互作用しても、下層の透光性酸化物導電膜に
よって電気的導通の確保ができる。Furthermore, since the fluorescent display tube of this example has a two-layer structure consisting of a light-transmitting oxide conductive film and a metal conductive film as described above, the metal conductive film is Even if the insulating film and the insulating film interact, electrical continuity can be ensured by the underlying transparent oxide conductive film.
従って、金属導電膜の厚さを20OA乃至1000Aと
薄くすることができ、この金属導電膜による反射をなく
すことができ、表示品位に優れた蛍光表示管が可能であ
る。Therefore, the thickness of the metal conductive film can be made as thin as 20 OA to 1000 Å, and reflection by the metal conductive film can be eliminated, making it possible to provide a fluorescent display tube with excellent display quality.
なお、透光性酸化物導電膜の厚さは、100OA乃至1
0000Aの範囲が実用的で最も好ましく、厚さがこの
範囲より薄い場合には、電気的導通の確保が困難となシ
、また該範囲より厚い場合は、発光表示が観察面側に取
り出される効率が悪くなり、実用的でない。Note that the thickness of the transparent oxide conductive film is 100OA to 1
A range of 0000A is most preferred for practical purposes; if the thickness is thinner than this range, it will be difficult to ensure electrical continuity, and if it is thicker than this range, the efficiency of emitting the light emitting display to the viewing surface will be poor. becomes worse and is not practical.
また、同様忙金属導電膜の厚さは、200A乃至100
0Aの範囲が実用的でよシ好ましい。Similarly, the thickness of the metal conductive film is 200A to 100A.
A range of 0A is practical and preferred.
以上説明したように、本発明は、透光性酸化物導電膜、
金属導電膜の2層構造の上に、蛍光体を形成することに
よシ、蛍光体への透光性絶縁基板(板ガラス)からのア
ルカリ成分の拡散の防止及び蛍光体の実効の陽極電位の
減少の防止をすることができ、輝度特性の改善を図れる
効果がある。As explained above, the present invention provides a transparent oxide conductive film,
By forming the phosphor on the two-layer structure of the metal conductive film, it is possible to prevent the diffusion of alkaline components from the light-transmitting insulating substrate (plate glass) into the phosphor and to change the effective anode potential of the phosphor. This has the effect of preventing the decrease in brightness and improving the brightness characteristics.
また、本発明は、金属導電膜の厚さを特に200A乃至
1000Aと薄くすることができるから、金属導電膜に
よる反射がなく、表示品位が優れる効果もある。Further, in the present invention, since the thickness of the metal conductive film can be made as thin as 200A to 1000A, there is no reflection due to the metal conduction film, and the display quality is excellent.
第1図は本発明の第1の実施例の蛍光表示管の陽極基板
グリッド及びフィラメントの断面図、第2図、第3図は
いずれも従来の蛍光表示管の断面図である。
1・・・・・・透光性絶縁基板、2,2a・・・・・・
金属電極、2b・・・・・・表示部の金属電極、3・旧
・・絶縁層、4・・・・・・蛍光体、5・・・・・・グ
リッド、6・・・・・・フィラメント、7・・・・・・
透光性酸化物電極。
代理人 弁理士 内 原 晋
箭Z図
箭づ図FIG. 1 is a cross-sectional view of an anode substrate grid and filament of a fluorescent display tube according to a first embodiment of the present invention, and FIGS. 2 and 3 are cross-sectional views of a conventional fluorescent display tube. 1... Translucent insulating substrate, 2, 2a...
Metal electrode, 2b...Metal electrode of display section, 3. Old... Insulating layer, 4... Phosphor, 5... Grid, 6... Filament, 7...
Transparent oxide electrode. Agent: Patent Attorney Uchihara Shinshu
Claims (1)
布して表示パターンを形成し、フィラメントから放出さ
れる電子を前記蛍光体に衝撃させて発光させ、前記透光
性基板の電極の形成面と反対の面より表示を観察する蛍
光表示管に於いて、前記電極のうち第1層目を透光性酸
化物導電膜、この上の第2層目を金属導電膜で形成し、
前金属導電膜上に前記蛍光体が形成されていることを特
徴とする蛍光表示管。A display pattern is formed by coating a phosphor on an electrode on a translucent substrate constituting an airtight container, and electrons emitted from a filament are applied to the phosphor to cause it to emit light. In a fluorescent display tube in which the display is observed from the surface opposite to the surface on which the electrode is formed, the first layer of the electrode is formed of a transparent oxide conductive film, and the second layer thereon is formed of a metal conductive film. ,
A fluorescent display tube, characterized in that the phosphor is formed on a pre-metallic conductive film.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19863888A JPH0246638A (en) | 1988-08-08 | 1988-08-08 | Fluorescent character display tube |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19863888A JPH0246638A (en) | 1988-08-08 | 1988-08-08 | Fluorescent character display tube |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0246638A true JPH0246638A (en) | 1990-02-16 |
Family
ID=16394538
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19863888A Pending JPH0246638A (en) | 1988-08-08 | 1988-08-08 | Fluorescent character display tube |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0246638A (en) |
-
1988
- 1988-08-08 JP JP19863888A patent/JPH0246638A/en active Pending
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