JPH0245630U - - Google Patents
Info
- Publication number
- JPH0245630U JPH0245630U JP12523088U JP12523088U JPH0245630U JP H0245630 U JPH0245630 U JP H0245630U JP 12523088 U JP12523088 U JP 12523088U JP 12523088 U JP12523088 U JP 12523088U JP H0245630 U JPH0245630 U JP H0245630U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- lower electrode
- dry etching
- gas
- gas inlets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001312 dry etching Methods 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12523088U JPH0245630U (sv) | 1988-09-26 | 1988-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12523088U JPH0245630U (sv) | 1988-09-26 | 1988-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0245630U true JPH0245630U (sv) | 1990-03-29 |
Family
ID=31375653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12523088U Pending JPH0245630U (sv) | 1988-09-26 | 1988-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0245630U (sv) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03290928A (ja) * | 1990-04-06 | 1991-12-20 | Fuji Electric Co Ltd | 加工方法 |
-
1988
- 1988-09-26 JP JP12523088U patent/JPH0245630U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03290928A (ja) * | 1990-04-06 | 1991-12-20 | Fuji Electric Co Ltd | 加工方法 |