JPH0243672Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a positioning device for a manipulator installed in a steam generator or the like.

[Prior Art] For example, steam generators in nuclear power plants are subjected to various inspections during periodic inspections and the like in order to improve their reliability. The water chamber of such a steam generator has a hemispherical shape divided by a tube plate into which a plurality of thin tubes are inserted, and when accessing from the thin tube inlet, the water chamber is accessed from the water chamber, but the inside of the water chamber is in a radiation atmosphere. Therefore, a remote device (manipulator) is required for this work.

[Problems to be solved by the invention] However, conventional manipulators position the tools by inserting the positioning shaft into the hole in the tube sheet, that is, using the hole in the tube sheet as a reference. Because of this, it requires a lot of effort to insert and install, and furthermore, when the hole in the tube sheet is filled with a blind plug, there are problems such as extremely limited usability.

The present invention has been made in view of the above circumstances, and is intended to provide a positioning device for a manipulator that can easily position a positioning shaft (clamp shaft).

[Means and actions to solve the problem] The main points of the present invention are listed below.

The tip of the polar coordinate manipulator is equipped with a fiberscope and an IVTV camera for position confirmation, and a control circuit that can input and correct position errors enables flexible position correction.

By inputting the image taken by the ITV camera into an image analysis device and measuring and analyzing the amount and size of the center deviation, it is possible to measure the amount of error in the horizontal and vertical directions, and in turn, obtain accurate positioning information from the target position. You can know directly.

Accurate automatic positioning is made possible by adding a calculation mechanism that makes it possible to correspond to the required axis position using the values determined above.

[Example] Hereinafter, an example of the present invention will be described with reference to the drawings.

FIG. 1 is a perspective view showing a steam generator, which is a type of heat exchanger that exchanges heat with pressurized water (primary water) heated in a pressurized water nuclear reactor to vaporize secondary water. 1 in the figure is a cylindrical shell, and a hemispherical water chamber 2 is formed in the lower part of this shell. This water chamber 2 is partitioned by a tube plate 3 having a large number of thin tube holes 7 and a partition wall 5. Further, a U-shaped thin tube group 4 supported by the tube plate 3 is disposed within the cylindrical shell 1, and primary water flows through this thin tube group 4.
In addition, 6 in the figure is a manhole into which a fixed beam of a fixed frame device to be described later is inserted.

As shown in FIG. 2, a manipulator attached to a fixed frame is installed in the water chamber 2 below the tube plate 3 of the steam generator shown in FIG.

In the figure, 15 is a fixed frame, and this fixed frame 15
is equipped with a fixed beam 21 inserted into the water chamber 2 from the outside through the manhole 6 of the water chamber 2. A fixing base 16 is provided at the tip of the fixing beam 21, and a lower plate of a scanning manipulator is fixed to the fixing base 16 via a cam lock lever 34.

The fixing beam 21 of the solid frame 15 is supported by a fixing plate 17 fixed near the manhole 6 with fixing screws 11, as shown in FIG. The fixing screw 11 pulls the fixing plate 17 away from the manhole surface 18 to generate gravity. As shown in FIG. 3, the fixed beam 21 has a fixed block 14 at a location in contact with the water chamber surface 19 near the manhole, and a bent portion 2 at a location corresponding to the water chamber surface 19.
has 0. Also, the tip of the fixed beam 21 is connected to the pin 2.
The rear end side serves as an assembly table 23 and the beam 21
The upper surface of forms a guide rail 24. In addition, numeral 39 in the figure is a tightening nut, and this nut 39 is attached to the fixing plate 17 in a thrust-supported state and free of rotation.

The structure of the fixing base 16 will be explained with reference to FIGS. 4a and 4b, which show a state in which the fixed cylinder 25 of the manipulator is fixed to the upper surface. Jacks 12, 12 are attached to both sides of the fixing base 16, respectively.
These jacks 12, 12 are motors (not shown).
A gear system that meshes with the output gear 26 of the shaft, the gear 27 of the worm shaft (not shown), the worm wheel 28 with a torque limiter, the screw 33 that is pivotally attached to the worm wheel 28, and the telescopic cylinder 29 that is slidable and rotatable. It consists of a screw system consisting of a nut 30 that prevents A ball bearing 31 is attached to the lower end of the telescopic cylinder 29.
is swingably joined to a fixed cylinder 32 having a high coefficient of friction.

On the other hand, two pairs of cam lock levers 34 are provided on the other side of the fixing base 16. The cam lock lever 34 is tiltably installed in an electric cylinder 35 having an expansion and contraction mechanism equivalent to a reaction force jack attached to the fixing base 16 via a ball bearing 31'. The cam lock lever 34 is supported by the fixing base 16 via a pin 36, and the claw at the upper end of the lever 34 is attached to a boat-shaped fixing block 37 having a guide roller 38 fixed to the lower surface of the fixed cylinder 25. Pressure welding is now possible.

The manipulator includes a rotating base 151 (theta axis) that horizontally rotates on a fixed frame 15, and a rotating base 151 (θ axis) that rotates horizontally on a fixed frame 15.
A telescopic main arm 101 provided in 51
A sub-arm 401 is provided at the tip of the main arm 101, and this sub-arm 401 also has a rotation axis (α-axis) that horizontally rotates, and an axis that moves the main arm 101 up and down. and a clamp shaft 351 (C-axis) that moves in a direction perpendicular to the sub-arm 401. Additionally, swing axes (k-axis, λ-axis) orthogonal to each other are provided in order to adjust the reference swivel table 151 so as to be parallel to the scanning plane (tube plate 3). Tools, inspection devices, etc. necessary for the work are attached to the tip of the sub-arm 401 and scanned to any desired position.

By the way, the manipulator mentioned above has R, θ,
, β, α, and C axes, it is possible to scan to an arbitrary position, but the fixing error of the fixed base 16 of the fixed base 15, which serves as the reference plane, affects the rotating base 151, etc. A mechanism is provided on the fixed base 16 to correct the swivel base so that it is parallel to the tube plate 3. For this reason, the fixed cylinder 25 has a swinging mechanism as shown in FIGS.
51 at positions perpendicular to each other. The k-axis and the λ-axis are fixed cylinders 25 on the fixed base 16.
It is equipped with a K-axis holding block 459 installed inside the machine, and a swivel base 1 is mounted on the top of this holding block 459.
51 is placed, the k-axis is supported by the k-axis holding block 459 and tilts the rotating table 151, and the λ-axis provided in the direction perpendicular to this is supported by the fixed cylinder 25 and tilts the k-axis holding block 459. This causes the swivel base 151 to tilt.

First, regarding the k-axis, holding frames 462 and 463 protruding from the lower end surface of the swivel base 151 are rotatably provided on the k-axis holding block 459 with pins 460 and 461, and the swivel base is also mounted in a direction perpendicular to this. A protrusion is provided below 151, and links 457a, 457b and link 458 are attached to this protrusion.
a, 458b are provided rotatably by pins 451 and 452, and the respective links 457a, 45
Nuts 455 and 456 are fixed between 7b and between links 458a and 458b, forming U-shaped links, respectively, and k-axis ball screws 453 and 454 are attached to the nuts 455 and 456, respectively.
are screwed together. This k-axis ball screw 453,4
54 have opposite threads, and when rotated in the same direction, they move in the opposite direction and tilt the swivel table 151. The ball screws 453 and 454 are driven by a drive pinion 468 of a k-axis drive motor 464 fixed to a k-axis holding block 459 via an idler 467, and a ball screw drive gear 465 provided at the end of the ball screw.
This is done by meshing with 466. A mechanism with a similar configuration is also provided for the λ-axis for tilting in a direction perpendicular to this, and this λ-axis is connected to a k-axis holding block 459 with rotation pins 511 and 512, and a bearing held on the swivel base 151. 51
3,514 and is rotatably held. Also,
The k-axis ball screw 45 is attached to the k-axis holding block 459.
3,454 in the direction perpendicular to the λ-axis ball screw 50.
1,502 are screwed into nuts 503, 504 provided on links 505, 506. Also, link 50
5 and 506 are rotatably held by a k-axis holding block 459 by holding pins 507 and 508. The λ-axis ball screws 501 and 502 are driven by a ball screw drive gear 51 provided at the end of the λ-axis ball screw.
8,519 meshes with the drive pinion 516 of the λ-axis drive motor 515 via the idler 517.

Adjustment of the parallelism of the swivel base 151 using the k-axis and the λ-axis is performed using the k-axis drive motor 464 as shown in FIGS. The rotational force is transmitted from the drive pinion 468 to the idler 467 and further to the ball screw drive gears 465, 466.
Rotate 454. At this time, the ball screw 45
3,454 are opposite threads to each other, so nut 45
5,456 moves the same amount in the opposite direction. Therefore, links 457, 458, holding pins 451, 4
52, the link mechanism consisting of the pivot pins 460, 461 rotates around the pivot pins 460, 461 and tilts the pivot table 151. Also, in the direction perpendicular to this, a similar mechanism is used to hold the k-axis holding block 459.
Since the swivel table 151 is tilted, the swivel table 151 is tilted.

Note that the fixed cylinder 25 is attached to its fixed block 3.
Guide rollers 38 attached to 7 allow the manipulator to run along the upper surface (guide rail 24) of the fixed beam 21 of the fixed frame 15 with the manipulator installed, and when operating the manipulator, the manipulator can be moved outside the water chamber 2. From there, it passes through the manhole 6 and is set on the fixing base 16 of the fixed frame 15 in the water chamber 2.

Next, the polar coordinates R,
The R axis, the θ axis, and the axis that move according to θ will be explained in order. As shown in FIGS. 2 and 7, the R-axis, that is, the main arm 101, has a mechanism that converts the forward and reverse rotation of the ball screw 102 into reciprocating motion, and is of a telescoping double-telescoping type, and has a round shaft for holding. (R ₁ axis) 103, center axis (R ₂ axis)
104, and an inner shaft (R ₃ axis) 105, which is provided on a θ axis, that is, a swivel table 151, which will be described later. This R ₁ axis 103, R ₂ axis 104, R ₃ axis 105
As shown in detail in Fig. 7, _R2 axis 10
4. Guide rail 10 provided on _R3 axis 105
6, 107 and is slidably held by a holding bearing. The guide rail 106 is fixed to the _R2 shaft 104 with a bolt 108 and a nut plate 109, and a support pin 110 fixed to the _R1 shaft 103.
The structure is supported by Also, similarly,
The guide rail 107 is fixed to the _R3 shaft 105 with bolts 113 and a holding frame 115 of the ball screw 102, and the support pin 11 fixed to the _R2 shaft 104.
6. It is slidably held by bearings 117 and rollers 118. To drive these R shafts 101, as shown in FIG. 8, a pinion 120 coupled to an R shaft drive motor 119 meshes with a gear 121 fixed to a ball screw 102. This ball screw 1
02 is provided with a ball nut 122 fixed to the _R3 shaft 105 (not shown in FIG. 8) to convert rotational motion into reciprocating motion. In addition, R axis 10
The detection mechanism for detecting the amount of expansion/contraction in step 1 includes a detection gear 123 fixed to the ball screw 102.
It meshes with a gear 125 fixed to an encoder 124 at an appropriate meshing ratio, and the amount of expansion and contraction of the R shaft 101 is detected from the amount of rotation of the ball screw 102. In addition, during the expansion and contraction operation, the R ₂ axis 104 and the R ₃ axis 105
Since the amount of expansion is regulated by a stopper (not shown), both axes are expanded and contracted at an appropriate rate.

Next, a swivel base 151 that rotates around the θ axis, that is, horizontally.
As shown in FIG. 9, a cylindrical turning tube 152 is provided in the center and projects downward, and the k-axis holding frame 459, which forms one of the parallel adjustment mechanisms of the turning table 151 to be described later, and its Links 457, 458 (5th
Fixed gear stand 153 connected with
It is rotatably supported by rotation bearings 154, 155 and a thrust bearing 156 installed in the. In addition, since the joint frame 163 provided on the top surface of the swivel base 151 is fixed with bolts 164, the joint frame 163 and the swivel base 1 are fixed with bolts 164.
51 can be separated. This turning table 151
As shown in FIG.
A pinion 158 and a drive pinion 161 are fixed to a θ-axis drive motor 157 fixed to the θ-axis drive motor 157 , and the drive pinion 161 meshes with a fixed gear 162 fixed to the swivel base 151 . In addition, the amount of rotation can be detected by
This is achieved by the pinion 158 meshing with a gear 160 of an encoder 159 provided on the swivel base 151. This θ-axis operation rotates the θ-axis drive motor 157, and rotational force is transmitted from the drive pinion 161 to the fixed gear 162 of the swivel base 151, so that the θ-axis drive motor 157 revolves together with the swivel base 151. In addition, by separating the joint frame 163, the R-axis, the θ-axis mentioned above, the axis mentioned later, and the α
The axis and β axis are also divided. Further, the amount of turning can be determined by the encoder 159.

Next, the axis, that is, the elevation axis will be explained.
This axis is the main arm 101 (R
This is to raise and lower the shaft. As shown in FIG. 10, a swing pin 202 provided at the base end of the _R1 shaft 103 is rotatably supported by a bearing 204 held in a bearing holding frame 203 fixed to a swing base 151. Also, a pair of elevation cylinders 201 are arranged on the sides of the R axis 101, one end of which is attached to the upper part of the _R1 axis 103 with pins 208a, 208.
A ball screw 212 is fixed to the inner cylinder 215 of the elevating cylinder 201 at the other end, and a bevel gear 217 is fixed to the tip. The other elevation cylinder has a similar configuration. Furthermore, bevel gears 207 and 218 are provided at both ends of a rotating shaft 206 supported by a bearing holder 205 provided at one end of the joint frame 163, and this bevel gear 207 is connected to the bevel gear 21.
meshes with 7. The drive unit of this elevation cylinder 201 is shown in FIG. 10 and in FIG.
As shown in the figure, a rotating gear 213 is provided on the ball screw 212, a shaft drive motor 209 is provided on the outer cylinder 216 of the elevation cylinder 201, a drive gear 210 is provided at the tip of this shaft drive motor 209, and a drive gear 210 is provided at the tip of this shaft drive motor 209. A drive gear 210 meshes with a rotating gear 213 of the ball screw 212 via an idler 211. Furthermore, the bevel gear 218 of the other elevating cylinder 201 is driven in the same way, allowing smooth elevating. Further, the amount of elevation is detected by a detection gear 220 fixed to the turning pin 202 at one end of the R axis 101 meshing with a detection gear 222 of an encoder 221. As shown in FIGS. 10 and 12a, the rotational force of the shaft drive motor 209 is transmitted to the ball screw 212 via an idler 211 and a rotating gear 213. At the same time, a bevel gear 217→
Bevel gear 207→Bevel gear 218 of rotating shaft 206
→The rotational force is transmitted via the bevel gear 223, and the ball screw 212 rotates by the same amount. At this time,
A thrust force f ₅ as shown in FIG _.
Since the shaft 103 is held by a bearing 203, the component force f ₄ acts as a rotational force, and the rotation pin 202
The R-axis 101 is raised and raised by a considerable amount.

The R-axis, θ-axis, and axes described above are provided at the base end of the main arm 101 and scan the tip of the main arm 101 to an arbitrary scanning point by extending/contracting, turning, and tilting, respectively.
A sub-arm 401 is provided at the tip of the sub-arm 401 for attaching tools and the like, and various operations are performed using the tools and the like at this tip. This sub arm 401
Also, β-axes, α-axes, and C-axes are provided for expanding the scanning range, adjusting the posture during scanning, holding the load, etc. Therefore, let's talk about the β axis. As shown in FIG. 13, a β axis, that is, an auxiliary elevation axis is provided at the tip of the R axis 101 in order to correct the attitude of the sub arm 401. To support this β axis, β
The shaft frame 305 is R ₃ bolts 304 to the shaft 105
is fixed. A frame 301 protrudes from this β-axis frame 305, and this frame 3
01 is provided with a bearing, a swing pin 303 is rotatably held, and a sub-arm 401 is mounted on the swing pin 30.
It is fixed at 3. Sub arm 401 around β axis
The drive of R ₃ is attached to the β-axis frame 305.
β-axis drive motor 306 protruding to the shaft 105 side and β
Pinion 30 provided within shaft frame 305
7. Connection gears 309, 310, worm gear 31
The pinion 307 of the β-axis drive motor 306 rotates the worm shaft 312 via the connecting gears 309 and 310, and the worm 311 of the worm shaft 312 and the worm wheel 313 mesh with each other. A reduction gear 314 provided coaxially with the drive gear 302 provided on the pivot pin 303 meshes with each other, and the rotational force of the motor is transmitted. The amount of elevation is detected as shown in Figure 14.
Encoder 316 provided within β-axis frame 305
is the encoder gear 31 provided on the worm shaft 312.
5 and a pinion provided on the encoder 316 mesh with each other, and the encoder 316 is rotated. The β-axis movement prevents the sub-arm 401 from changing its attitude with respect to the tube plate 3 due to the above-mentioned axis movement, and as shown in FIG. When the R-axis 101 is horizontal, the sub-arm 401 and the tube plate 3 are parallel, but as the angle changes clockwise due to elevation, the attitude of the sub-arm 401 also changes, and when the R-axis 101 finally becomes vertical. It becomes perpendicular to tube plate 3. Therefore, by tilting the sub-arm 401 around the β-axis as the angle changes, it is possible to keep the sub-arm 401 parallel to the tube plate 3 at all times.

Next, the α-axis that rotates this sub-arm 401,
That is, the rotation around the clamp shaft 351 is achieved by a gear 402 provided on a sub-arm 401 supported by a bearing (not shown) on the clamp shaft 351, as shown in FIG. 13 described above. This α-axis drive section is the first
As shown in FIG. 6, an α-axis drive motor 403, a pinion 410, an idler 404, a reduction gear 405,
It is composed of a reduction gear 406 and a drive gear 407. Further, the amount of rotation is also detected by rotating an encoder 409 using a detection gear 408 that meshes with a reduction gear 405. The rotational movement of the sub-arm 401 is caused by the rotational force of the α-axis drive motor 403
10 → idler 404 → reduction gear 405 → reduction gear 406 → drive gear 407 to be transmitted to gear 402. By rotating the sub-arm 401 in this way, it is possible to scan the entire area, including the corners of the water chamber 2 and the vicinity of the partition wall 5, without interfering with the walls of the water chamber 2 or the partition wall 5. This is shown in FIG. In the figure, 411
4 shows the concept of the overall shape of the α-axis drive section.
Reference numeral 12 indicates a scanning point, and the portion indicated by the two-dot chain line is the case where the sub-arm 401 is not present, and the diagonally shaded portion indicates the interference state. The length of the sub-arm 401 is 5 times the pitch of the tube arrangement (when it is a square lattice arrangement when viewed from any direction) or an integral multiple thereof, or 13
By setting the number to double or an integral multiple thereof, the number of heat exchanger tube positions that can be scanned when the sub-arm 401 is rotated increases. This is shown in FIG. In the figure,
Each intersection indicates the position of the heat transfer tube, and the sub-arm 401
When the length of is set to 5 times the piping pitch, in this case, 12 points indicated by circles can be scanned.

Next, the C-axis, that is, the clamp axis, provided at the distal end of the main arm 101 and the base end of the sub-arm 401 will be described. A clamp shaft 351 for clamping to the thin tube hole 7 of the tube plate 3 is vertically supported by the sub-arm 401 and is movable up and down. The clamp mechanism at the tip of the clamp shaft 351 has a tapered tip, as shown in detail in FIG.
52 is provided, and the outer periphery of this pawl 352 is held by an O-ring 353. Further, a clamp piston 354 is integrally provided at the other end of the clamp shaft 351. Further, the clamp shaft 351 is assembled inside an elevating shaft 359, and placed in a clamp cylinder 358 formed inside this elevating shaft 359. The outer periphery of this clamp cylinder 358 becomes a lifting piston 361 and is placed inside the lifting cylinder 360. Air is supplied to the clamp cylinder 358 from a clamp air supply hole 364 of an air supply block 355 provided at the lower end of the clamp shaft 351, through the center of the clamp shaft 351, and through a clamp air hole 356 communicating with the clamp piston 354. To release the clamp, use the supply pipe 3 provided by penetrating into the lifting cylinder 360 from the unclamping air supply hole 365 of the air supply block 355.
57 communicates with the clamp cylinder 358, this is done. Further, in order to raise and lower the elevator shaft 359, a lifting cylinder 360 is provided with a lifting air hole 362 at its lower end and a lowering air hole 363 at its upper end. Further, a fiber head 367 is provided at the tip of the clamp shaft 351 as a position detection device, and a fiber scope 366
through which a scale plate 370 (see FIG. 20) is optically coupled to an ITV camera 368 provided with the
It is connected to a TV monitor 369.

Next, the correction value input mechanism will be explained with reference to FIG. 374 in the figure is a correction value digital switch for inputting three-dimensional direction correction values Δx _D , Δy _D , z _D for the tube sheet 3;
is connected to bus 375 via a suitable interface (not shown) contained therein. Further, 376 in the figure is an address switch for inputting three-dimensional positions X, Y, and Z with respect to the tube sheet 3, and this switch 376 connects an appropriate interface (not shown) included therein. It is connected to the bus 375 via the bus 375. In addition, the bus 37
5 scans each axis such as R, θ, axis, etc. mentioned above.
Connected to CPU377. Note that these switches 374, 376, CPU 377, etc. are incorporated into the control panel.

Using the correction value input mechanism shown in FIG. 21, operations such as positioning of the clamp shaft 351 will be explained.

First, the tube plate 3 (thin tube hole 7) corresponding to the command position
By inputting the addresses X, Y, and Z below through the address switch 376, the CPU 377 uses the necessary parameters to control each axis of the manipulator (R, θ,
axis) can be moved.

In the above movement, when the positioning errors of addresses X, Y, and Z are solved, the corresponding correction values Δx _D ,
By inputting Δy _D and z _D from the correction value digital switch 374, each axis of the manipulator (R, θ, axes) can be moved and adjusted to the target value with the relative amount corrected in advance, and the positioning error is canceled out. Accurate positioning becomes possible.

On the other hand, when the correction value is unknown, after reaching the target point, the ITV camera 368
Image 37 of the capillary hole 7 on the reference line 371 of 70
3 on the TV monitor 369, read the position of the thin tube 4, and calculate the corresponding correction value.
When inputted to the CPU 377, each axis (R, θ, axis) of the manipulator is repositioned and can be statically fixed at a desired position. That is, by inputting the necessary position and correction value and performing correction calculations by the CPU 377, it is possible to perform an operation that is normally error-free.

In this way, each axis such as R, θ, axis, etc.
After being scanned below, the clamp shaft 351 is operated. First, as shown in FIG. 19 described above, compressed air is sent to the lifting cylinder 360 through the lifting air hole 362 by an air supply device (not shown), the lifting piston 361 rises, and the lifting shaft 359
The clamp shaft 351 and the clamp shaft 351 rise together and are inserted into the thin tube hole 7. Next, compressed air is supplied to the clamp cylinder 358 through the clamp air supply hole 364→clamp air hole 356, the clamp shaft 351 integrated with the clamp piston 356 is pushed down, and the pawl 352 opens in a circumferential manner due to the tapered portion and the pipe wall and crimp. Therefore, the clamp shaft 351 is securely fixed to the thin tube hole 7 by the frictional force. To release the clamp shaft 351, contrary to when clamping,
By supplying compressed air from the unclamping air supply hole 365, the clamp shaft 351 integrated with the clamp piston 354 rises, and the claw 352 separates from the small tube wall due to the contractile force of the O-ring, and the lowering air hole Lifting piston 361 by supplying compressed air to 363
descends and is pulled out from the thin tube hole 7.

Next, automatic correction will be explained with reference to FIG. 22.

378 in the figure is an image analysis device to which a video signal is input from the ITV camera 368 via a camera controller 379. This image analysis device 37
A changeover switch 380 is provided so that the output of No. 8 can be displayed on a TV monitor 369 after processing. Further, the output side of the analysis device 378 is connected to an interface 381. This interface 381 is connected to the aforementioned bus 375 shown in FIG. 21, which is incorporated into the control panel 382. The interface 381 also includes a control signal line 383 for controlling signal processing timing.
is provided, and this signal line 383 is connected to the image analysis device 378.

Next, a positioning method using the automatic correction system shown in FIG. 22 will be explained.

(b) Measurement of error The image analysis device 378 shown in FIG.
It has a binarization process that binarizes the pore image signal of the ITV camera 368, a circle approximation processing unit that approximates the binarized image to a circle, and a detection unit that detects the diameter and center coordinates of the approximate circle. be.

Since the ITV camera 368 usually obtains images by scanning electrons over accurate squares, addresses are assigned to these squares, and the information at each address is binarized (black and white) by the image analyzer 378. An image of the capillary pore as shown in FIG. 23 is obtained. Next, in the image analysis device 378, a general method (noise countermeasure, smoothing, correlation, etc.) is applied to the binarized signal.
Approximate the circle by applying . Next, the image analysis device 3
In 78, the approximate circle obtained in this way and ITV
When the coordinates of the camera 368 (the crosshairs of the scale plate (transparent plate) 370) are superimposed, the 24th
The result will be as shown in the figure. By geometrically analyzing this image, we can determine the diameter of the approximate circle and the diameter of the tube hole from the center coordinates of the ITV camera 368 (here, the reference coordinates coincide with the centers of the clamp axis 351 and the fiber head 367). Center displacement Δγ,
Δθ' or error is calculated.

Furthermore, the CPU 377 controls the clamp shaft 351.
(fiber head 367) and the thin tube hole 7 (i.e., the lower surface of the tube plate 3), and the clamp shaft 3.
51 (fiber head 367) center and thin tube hole 7
The horizontal distance from the center is calculated. First, the vertical distance Z' from the target can be found from the diameter D of the approximate circle. That is, as shown in FIG. 25, since the relationship between the vertical distance and the diameter D of the approximate circle is known, the vertical distance Z' is uniquely determined from the relationship Z'=f(D). Furthermore, the relationship between the above-mentioned displacements Δγ, Δθ′ and the actual length of the error is known in advance, and using the coefficient (multiple) m, it is calculated as Δγ=m・Δγ Δθ′=m・Δθ′ .

(b) Correction of errors As shown in Figure 26a and b, the obtained Δγ,
Δθ' and ΔZ' are related to the manipulator information, R, and θ. Here, Z ₀ is the distance between the origin and the tube sheet 3 and is therefore known. That is, the given position is γ=√ ² −( ₀ −′) ² Rc=√(+) ² +( ₀ −) ² θ=θ′／γ c=tan ⁻¹ γc／｜Z ₀₁ |−Z=tan ^-1 γ+Δγ/|Z ₀ |−Z.

Therefore, the image analysis device 3 in FIG.
The displacements Δγ, D, Δθ′ from 78 are
81, output to CPU 377 via bus 375,
If you replace R and θ, calculated as the first target values by this CPU 377, with the previous values and reposition as {R=Rc θ=θc =c α=−θ β=90−}, the position error will be completely eliminated. This ensures very high positioning accuracy. FIG. 27 shows a flowchart. In addition, 601 in FIG. 27 is a target value X, Y, Z designation input section, 602 is a coordinate conversion section, 603 is a corrected coordinate section, 604 is a correction value input section, 605 is a nodal coordinate calculation section, 606 607 is a coordinate calculation unit, 375 is an image analysis device, and 608 is a corrected coordinate output unit. However, although we omitted the explanation of the nodal calculation,
This is a control style between the target position and the previous position, and is not particularly related to the present invention.

[Effects of the Invention] As detailed above, the present invention can exhibit the following various effects.

(1) Since the lack of device precision is completely automatically corrected using the target position, extremely high precision positioning can be achieved.

(2) During the above positioning, the device only needs to perform initial positioning with enough positional accuracy to not lose sight of the target position, so it is possible to lower the device rigidity and accuracy, making the device smaller, lighter, and less expensive. can significantly contribute to the development of

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing the steam generator of the heat exchanger;
Figure 2 is an external perspective view showing the working manipulator and fixed frame installed in the water chamber of the steam generator, Figure 3 is an explanatory diagram showing the fixed frame, and Figures 4 a and b are the fixing frame of the fixed frame and this. Fig. 4a is a perspective view, Fig. 4b is an explanatory diagram of the assembly of the swinging mechanism, Figs. FIG. 7 is a cross-sectional view of the main arm (R axis), and FIG. 8 is a view taken along arrow B in FIG. 2, showing the drive section of the main arm. FIG. 9 is a central sectional view of the swivel table (θ axis), and FIG. 10 is a view taken along arrow B in FIG. 2, showing the driving portion of the elevation cylinder (axis). Fig. 11 is a cross-sectional view showing a partially extracted and enlarged driving section of the elevating cylinder; Figs. 12 a and b are explanatory diagrams of the operation of the elevating cylinder; a is a plan view; b is a front view; Fig. 13 is a second The tip of the main arm is shown in the view from arrow A in the figure. 14th
The figure is an enlarged cross-sectional view of the sub-arm's elevating mechanism (β-axis) and its detection part, Fig. 15 is an explanatory diagram of the elevating relationship between the main arm and sub-arm, and Fig. 16 is an enlarged extract of the sub-arm's rotation drive part. 17 is an explanatory diagram of the scanning range of the sub-arm, FIG. 18 is an explanatory diagram of the scanning point of the sub-arm, FIG. 19 is a sectional diagram showing an extracted and enlarged clamp axis (C-axis), Figure 20 is an explanatory diagram of the scale plate, No. 21
FIG. 22 is an explanatory diagram showing the correction input mechanism, FIG. 22 is an explanatory diagram showing the automatic correction system, FIGS. The figure is a flowchart showing the flow for obtaining a target value for automatic correction. 1...Cylindrical shell, 2...Water chamber, 3...Tube plate,
4... Thin tube group, 6... Manhole, 7... Thin tube hole, 12... Jacket, 15 ... Fixed frame, 16
...Fixing base, 17...Fixing plate, 21...Fixing beam, 34...Camrock lever, 101...Main arm (R axis), 103...Outer shaft for holding (R ₁
axis), 104... Middle axis (R ₂ axis), 105... Inner axis (R ₃ axis), 151... Swivel base (θ axis), 201...
Elevation cylinder (axis), 351... Clamp axis (C axis), 368... ITV camera, 369... TV
Monitor, 370... Scale plate, 374... Correction value digital switch, 376... Address switch,
377...CPU, 378...Image analysis device.

Claims (1)

[Scope of utility model registration request] An optical system is installed at the tip of a manipulator installed in the water chamber of the heat exchanger so as to face the pores of the heat exchanger, and a transparent plate with a scale of cross lines attached to this optical system. 2, an ITV camera having an imaging unit arranged at a position where the scale of the transparent plate and the pore image are displayed in an overlapping manner, and a binarization processing unit that binarizes the pore image signal of the ITV camera.
An image analysis device having a circle approximation processing unit that approximates a value-processed image into a circle, and a detection unit that detects the diameter and center coordinates of the approximate circle, and calculates the perpendicular distance between the optical system and the pore from the diameter of the approximate circle. 1. A manipulator positioning device comprising: a vertical distance calculation unit that calculates a horizontal distance between the optical system and the pore from center coordinates of an approximate circle;